GOALI: Laser-Jet Chemical Vapor Deposition (CVD) Rapid Prototyping of Electronic Devices and Laminated Materials

这项研究的目标是确定工艺-结构-性能的关系并进行工艺规划，以使新开发的激光喷射化学气相沉积(LCVD)快速成型(RP)系统能够高效运行，并通过制造先进的电子器件和结构材料来展示该系统的有效性。1999年8月开始运行的LCVD-RP系统是由该研究团队专门设计的，以实现复杂形状、3-D、复合电子/光子设备和结构材料组件的快速成型和制造。想象一下，激光和气体射流位于基片上方，其运动是计算机控制的。在任何时刻，激光都会加热衬底上的一个斑点，同时被局部喷射的CVD试剂气体淹没。由于热激活的CVD反应，只有被激光加热的斑点被涂覆。激光CVD和气体射流的结合在促进多种材料的沉积、最大限度地提高沉积速度和节省试剂方面具有显著的优势。以前的研究集中在制造简单的结构，如光纤阵列和螺线管，因为所用的过程控制并不复杂。LCVD-RP系统利用硬件、计算机控制和在线尺寸设备，将允许复杂、有用的复合设备和部件的增长。该系统具有以下新的特征：(1)三种操作模式，其中两种使用高速气体射流来提高沉积速率；(2)旋转/平移工作台，其便于工作台相对于激光和/或气体喷射的快速移动；(3)在线尺寸控制系统；以及(4)在线温度监测和控制。该系统能够制造传统方法无法制造的新型器件和材料微结构。例如，这项研究将展示先进的电子束光源的制造，以及g传感器或纤维增强纳米层复合材料的制造。

The goal of the research is to identify process-structure-property relationships and conduct process planning in order to permit efficient operation of the newly developed laser-jet chemical vapor deposition (LCVD) rapid prototyping (RP) system and demonstrate the usefulness of this system by fabricating advanced electronic devices and structural materials. The LCVD-RP system, which began operation in August 1999, was specifically designed by this research team to permit rapid prototyping and manufacture of complex shaped, 3-D, composite electronic/photonic devices and structural material components. Visualize a laser and gas jet positioned above a substrate whose movement is computer-controlled. At any instant, the laser heats a spot on the substrate, which is simultaneously flooded by a localized jet of CVD reagent gases. Only the spot heated by the laser becomes coated as a result of the thermally activated CVD reaction. The combination of laser CVD with gas jets offers significant advantages in terms of facilitating the deposition of multiple materials, maximizing deposition rate, and conserving reagent. Prior research has focused on producing simple structures such as fiber arrays and solenoids because the process control utilized was not sophisticated. The LCVD-RP system utilizes hardware, computer control, and on-line dimensional equipment that will permit growth of intricate, useful composite devices and components. The LCVD-RP system possesses the following novel features: (1) three modes of operation, two of which utilize a high velocity gas jet that increases the deposition rate, (2) a rotating/translating stage that facilitates rapid movement of the stage relative to the laser and/or gas-jet, (3) an on-line dimensional control system, and (4) on-line temperature monitoring and control. The system enables fabrication of novel devices and material microstructures that are impossible to fabricate by conventional methods. For example, the research will demonstrate the fabrication of an advanced electron beam source, and either a g-sensor or fiber-reinforced nanolaminate composite materials.