Depelopment of high sped formation technology of high precise capacitance element by laser assisted powder jet implantation method

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I designed the manufactured device which could form implanted four capacitance elements at the same time in a thermoplastic resin substrate, and the software for the equipment was also completed, which means that speedup of manufacturing was realized.It was confirmed that the decision coefficient on number of the laminating dependence and electrode area dependence was highly precise such as about 0.999. On the other hand, it was found that the capacitance value changes exponentially on the number of times to commute of formation of electrode layer because of crush effect of particles by jetting. Finally it was confirmed that the implanted four capacitance elements could be formed at the same time by using either of the infrared laser and the green laser.