SBIR Phase II: Planar Magnetic Levitation Technology for Precision Microelectronics Manufacturing Equipment

这个小型企业创新研究(SBIR)第二阶段项目将开发用于精密微电子制造设备的平面磁悬浮/定位器。在第一阶段已证实的可行性的基础上，第二阶段将设计、建造和测试一个可以很容易地集成到工艺工具中的最小致动器磁悬浮阶段。一个单一移动的磁悬浮压盘将由三个悬浮电机在所有六个自由度中驱动。压盘将产生用于运输的大的二维运动，以及用于对准和小调整的小的四轴运动。它将产生一种洁净室兼容、重量轻、紧凑、廉价的结构，能够满足下一代精密微电子制造中苛刻的动态性能要求。磁悬浮在需要精确平面位置控制的微电子制造设备中有许多潜在的应用，如晶片步进机、晶片搬运机、引线键合机、表面轮廓仪、扫描探针显微镜和精密检验机。这项技术预计将在竞争激烈的微电子制造资本设备行业占据突出地位。

This Small Business Innovation Research (SBIR) Phase II project will develop a planar magnetic levitator/positioner for precision microelectronics manufacturing equipment. Based on feasibility proven in Phase I, Phase II will design, construct, and test a minimum-actuator maglev stage that can be readily integrated in a process tool. A single-moving maglev platen will be driven in all six degrees of freedom with three levitation motors. The platen will generate large two-dimensional motions for transportation with small four-axis motions for alignment and small adjustments. It will lead to a clean-room compatible, lightweight, compact, inexpensive structure that can meet demanding dynamic performance requirements in next-generation precision microelectronics manufacturing.Magnetic levitation has many potential applications in microelectronics manufacturing equipment that require precise planar position control, such as wafer steppers, wafer handlers, wire bonders, surface profilometers, scanned probe microscopes, and precision inspection machines. This technology is expected to figure prominently in the highly competitive microelectronics manufacturing capital equipment industry.