SBIR Phase II: Improvement of Spatial Resolution in Scanning Microwave Microscopy

该小型企业创新研究(SBIR)第二阶段项目专注于提高微波显微镜的空间分辨率，特别是减少了测量采样区域，在该区域内可以精确地测量1 GHz-20 GHz的方阻和介电常数。特别关注的是专有半导体应用和介电性能的成像。为了实现这一目标，对现有原型的修改将导致在经济和学术重要领域的更多应用，包括非接触测量微波频率下介电常数的电场依赖关系和频率依赖关系。Neocera的工作将包括仪器改装、测试样品准备以及对探针-样品相互作用的彻底分析。数值模拟、半导体样品制备以及与基于不同反馈机制的仪器的比较将通过与马里兰大学的分包合同进行。第二阶段SBIR的结果将是一种为特定(专有)半导体应用开发的仪器，将带来数百万美元的市场。此外，这项技术将可用于各种研究应用，大学是潜在客户。

This Small Business Innovation Research (SBIR)Phase II project focuses on the improvement of spatial resolution in microwave microscopy, reducing in particular the measurement sampling area over which sheet resistance and dielectric permittivity at 1 GHz - 20 GHz can be determined with numerical accuracy. A particular focus will be on proprietary semiconductor applications and on the imaging of dielectric properties. Modifications of the existing prototype as required for this goal will lead to additional applications in fields of economic and academic importance, including the non-contact measurement of the electric field dependence and the frequency dependence of the dielectric permittivity at microwave frequencies. Work at Neocera will include instrument modifications, test sample preparation, and a thorough analysis of the probe-sample interactions. Numerical simulations, semiconductor sample preparation, and comparison to an instrument based on a different feedback mechanism will be per-formed through a subcontract with the University of Maryland. The result of this Phase II SBIR will be an instrument developed for a particular (proprietary) semiconductor application, leading to a multi-million dollar market. In addition, the technology will be available for various research applications, with universities being potential customers.