New Technologies for the Environment: Vapor Deposition of Photoimageable Dielectric Films

这一环境新技术项目将通过一项综合的实验研究，展示气相沉积可光成像介电聚合物薄膜的概念验证，这将提供对薄膜加工、性能、性能能力和限制的基本了解。如果成功，这项研究将为在印刷电路板制造和先进微电子封装中实现显著的环境优势奠定基础。聚合物薄膜固有的光敏性将消除整个制造流程中大量产生废物的工艺步骤，通过气相沉积生产薄膜将消除前驱体生产、薄膜应用和保质期到期过程中的溶剂浪费。这项研究将解决阻碍光可成像介电技术实施的关键障碍问题。重点将放在均苯四甲酸二酸酐和邻位脂肪族二取代二氨基二苯甲烷系列的共聚单体的自动光敏薄膜沉积上。将进行生命周期分析，以证明该技术的环境效益，包括最低排放、无溶剂薄膜生产和高前体利用率。

This New Technologies for the Environment project will demonstrate the proof-of-concept for vapor deposition of photoimageable dielectric polymer films through an integrated experimental investigation that will provide fundamental understanding of thin film processing, properties and performance capabilities and limitations. If successful, this research will lay the foundation for realization of significant environmental advantages in printed circuit board manufacture and in advanced microelectronics packaging. The inherent photosensitivity of the polymer films will allow the elimination of a significant number of waste-generating process steps from the overall manufacturing process flow, and the production of the thin films through vapor deposition will eliminate solvent wastes in precursor production, thin film application, and shelf-life expiration.This research will address key barrier issues inhibiting the implementation of photoimageable dielectric technology. Focus will be on auto-photosensitive film deposition from pyromellitic dianhydrides and co-monomers from the ortho-aliphatic di-substituted diaminodiphenylmethane series. Life Cycle Analyses will be conducted to demonstrate the environmental benefits of the technology including minimal emissions, solvent-free film production, and high precursor utilization.