SBIR Phase II: Integrated Reactor Scale and Topography Feature Scale Simulator for Plasma Enhanced Semiconductor Processes

这个小型企业创新研究（SBIR）二期项目将提供一个商业软件工具，该工具集成了反应器规模、（预）护套传输和特征规模模型，用于综合分析集成电路制造中的热化学气相沉积和低压等离子体过程。第二阶段将重点开发（预）护套模型、特征规模模拟工具、充电模型以及专有软件（称为CFD-ACE+）中的支持基础设施，以集成这些模型。第一阶段的（预）护套模型将得到增强，以解决其他常见的等离子体反应器操作条件。将开发一个基于现有专有软件的多物理场模型并嵌入到反应堆模型中的特征尺度模拟器。表面充电模型将与离子传输（预）鞘模型和鞘模型以及特征比例模型相结合。软件基础设施将被扩展，以简化所有特征尺度模拟器通用的模型定义步骤。该工具将为半导体行业的工程师提供一种方法来预测反应器设计和工艺条件对他们正在生产的器件组件的尺寸、形状和质量的影响。它将扩展CFD-ACE+商业反应堆规模建模软件，以与特征规模模拟器进行适当的接口。

This Small Business Innovation Research (SBIR) Phase II project will provide a commercial software tool that integrates reactor scale, (pre)sheath transport, and feature scale models for comprehensive analysis of thermal chemical vapor deposition and low pressure plasma processes in integrated circuit fabrication. Phase II will focus on development of (pre)sheath models, a feature scale simulation tool, a charging model, and the supporting infrastructure in proprietary software, called CFD-ACE+, to integrate these models. (Pre)sheath models from Phase I will be enhanced to address additional common plasma reactor operating conditions. A feature scale simulator, based on the multi-physics models of the existing proprietary software and embedded in the reactor model, will be developed. The model for surface charging will be integrated with the (pre)sheath and sheath models for ion transport and the feature scale models. The software infrastructure will be extended to simplify the model definition steps common to all feature scale simulators. This tool will provide engineers in the semiconductor industry with a means to predict the effect of both reactor designs and process conditions on the size, shape, and quality of the device components they are producing. It will extend the CFD-ACE+ commercial reactor scale modeling software to interface properly with feature scale simulators.