SBIR Phase I: Compact, Low-Cost, Time-of-Flight Residual Gas Analyzer

这个小型企业创新研究(SBIR)第一阶段项目将开发一种基于新的离子捕获概念的新型残余气体分析仪。与目前商用的残余气体分析仪(RGA)系统相比，新仪器将具有显著的成本和尺寸优势。如果这一概念成功，它有可能提供超过当前RGA技术的性能能力。这种新型陷阱作为精密质谱学的通用离子源也具有潜在的应用前景。第一阶段将：(1)设计和建造一个原理验证实验，以展示新型离子陷阱作为紧凑型RGA的离子源；(2)进行实验，以表征新仪器的性能；(3)评估仪器的可能扩展，并开发第二阶段实验室演示仪器的概念设计。这些新的RGA仪器有望在半导体制造、真空镀膜、电光、化学加工和环境监测等行业降低资本和制造成本。它还将使工业和大学研究实验室的新用户更容易获得RGA，这些用户目前负担不起这类仪器。

This Small Business Innovation Research (SBIR) Phase I project will develop a new type of residual gas analyzer based on a novel ion-trapping concept. The new instrument will have significant cost and size advantages over current commercially available residual gas analyzer (RGA) systems. If the concept is successful, it has the potential to provide performance capabilities exceeding current RGA technology. The new trap also has potential application as a general purpose ion source for precision mass spectrometry. Phase I will: (1) design and construct a proof-of-principle experiment to demonstrate the novel ion trap as an ion source for a compact RGA; (2) conduct experiments to characterize the performance of the new instrument; and (3) evaluate possible extensions of the instrument and develop the conceptual design for a Phase II laboratory demonstration instrument.These new RGA instruments are expected to reduce capital and manufacturing costs in industries such as semiconductor manufacturing, vacuum coating, electro-optics, chemical processing, and environmental monitoring. It will also make RGAs more available to new users in industry and university research laboratories, who presently cannot afford such instruments.