SBIR Phase II: Nonintrusive Species Specific Velocimeter

这个小企业创新研究第二阶段项目将开发一种被动的，非侵入性的物种特定速度计（SSV），同时测量火焰中多个物种的空间分辨速度，按物种和空间尺度大小对信息进行排序。SSV将适合于在空间上解决火焰内发生的混合和化学动力学，并在真实的时间跟踪这些影响。目前还没有仪器可以在紧凑的几何形状中被动且非侵入性地进行此类测量。SSV将在燃烧化学气相沉积（CCVD）这一新的沉积工艺中发挥关键作用。CCVD是一种连续的露天沉积工艺，针对广泛的薄膜涂层市场，包括电子、玻璃、防腐剂、超导体、催化剂、聚合物和纳米粉末。第一阶段通过测量不同空间尺度上的空间分辨、物种特异性CCVD火焰速度证明了可行性。第二阶段将是一个主要的证明计划，以（1）构建一个工程原型，（2）证明SSV数据和底线CCVD膜性能之间的相关性，（3）设计一个基于SSV的CCVD控制器，可以在私人资助的工厂经济地制造和商业化。 这项技术将促进智能沉积，简化CCVD的可靠性。与CCVD系统相结合，SSV将成为反馈控制模块的核心元件，以保持火焰的一致性并最大限度地提高沉积效率。这项技术的商业市场每年产生约5 000万美元。这个项目解决了先进的制造控制技术的兴趣。它支持改进和更可靠的涂层的开发，这将提高技术并降低许多常见产品的成本，例如计算机，电器和汽车中的电子存储设备。

This Small Business Innovation Research Phase II project will develop a passive, nonintrusive species-specific velocimeter (SSV) that simultaneously measures spatially resolved velocities of multiple species in a flame, sorting the information by species and spatial scale size. The SSV will be geared to spatially resolve the mixing and chemical dynamics occurring within flames, and to track these effects in real time. No instruments are available that can make such measurements passively and non-invasively in a com-pact geometry. The SSV will play a critical role in a novel deposition process, combustion chemical vapor deposition (CCVD). CCVD is a continuous open-air deposition process that is targeting a wide spectrum of thin-film-coating markets, including electronics, glass, anti-corrosives, superconductors, catalytics, polymers, and nanopowders. Phase 1 demonstrated feasibility by measuring spatially resolved, species-specific CCVD flame velocities on different spatial scales. Phase 2 will be a proof-of-principal program to (1) construct an engineering prototype, (2) demonstrate the correlation between SSV data and bottom-line CCVD film properties, and (3) design an SSV-based CCVD controller that can be fabricated economically and commercialized in a privately funded This technology will facilitate smart deposition that streamlines the reliability of CCVD. Incorporated into a CCVD system, the SSV will become the central element of a feedback control module that maintains the consistency of the flame and maximizes deposition efficiency. The commercial market for this technology generates about $50 million annually. This project addresses the interest in advanced control techniques for manufacturing. It supports the development of improved and more reliable coatings that will enhance technology and lower the cost of many common products, e.g. electronic memory devices in computers, appliances, and automobiles.