DYNAMIC IN-SITU STICTION AND FRICTION CHARACTERIZATION OF A MEMS

我们建议使用商用微机电系统（MEMS）来详细了解表面涂层和环境条件对粘滞和摩擦参数的影响。在这个项目下，我们将开发一个环境控制系统，允许在封装的商业MEMS[德州仪器的数字微镜显示器（DMD）中改变各种条件（湿度，温度，涂层等）。DMD是一个由约100万个独立可控的数字微镜组成的阵列，为测量具有统计显著性提供了一个稳定且特性良好的平台。除了原位表征外，我们还将使用接触角，原子力显微镜（AFM）和扫描电子显微镜（SEM）进行标准表面表征。接触角测量将用于确定应用于测试基材的抗粘和抗摩擦涂层的表面能。原子力显微镜（AFM）和扫描电镜（SEM）将用于成像涂层和下垫表面因磨损造成的任何损伤。更广泛的影响通过这个项目，我们将扩大与德州仪器数字光产品集团的协同关系，该集团是DMD的制造商。这种互动将通过为博士生提供与企业研究小组互动的机会来扩大，通过共享最先进的MEMS研究。TI将提供dmd、驱动镜子所需的控制器板和实习机会。

We propose to use a commercial Microelectromechanical System (MEMS) to develop a detailed understanding of stiction and friction parameters as a function of surface coating and environmental conditions.Intellectual MeritUnder this project, we will develop an environmental control system that will allow various conditions (humidity, temperature, coatings, etc) to be altered in a packaged commercial MEMS [Texas Instrument's Digital Micromirror Display (DMD). The DMD, an array of ~ 1 million individually controllable digital micromirrors, provides a stable and well-characterized platform for making measurements with statistical significance.In addition to the in-situ characterization, we will carry out standard surface characterization using contact angle, atomic force microscopy (AFM), and scanning electron microscopy (SEM). Contact angle measurements will be used to determine the surface energy of the anti-stiction and anti-friction coatings applied to test substrates. The AFM and SEM will be used to image any damage to the coatings and underlying surface caused by wear.Broader ImpactThrough this project, we will expand synergistic ties to TI's Digital Light Products group, the makers of the DMD. This interaction will be expanded by providing Ph.D. students the opportunity to interact with a corporate research group, through shared research on a state-of-the-art MEMS. TI will provide DMDs, the controller boards needed to actuate the mirrors, and internship opportunities.