SBIR Phase I: MEMS Mirror Arrays for Bioimaging Applications

这个小型企业创新研究（SBIR）第一阶段研究项目将展示制造大间距、光学平面、高分辨率和快速响应速度的可变形镜（DM）的可行性。DM是自适应光学的重要组成部分，可用于改进医学成像技术。该器件由分段膜阵列（SMA）和底部电极（BSB）组成，并通过微加工技术制造。该设计将使用镜像像素阵列来消除相邻元素之间的串扰。镜面像素将由无应力单晶硅（SCS）制成，以确保光学平面。该项目的商业应用将涉及多个领域，包括生物成像仪器、望远镜系统、3D数据存储系统和自由空间光通信。

This Small Business Innovation Research (SBIR) Phase I research project will demonstrate the feasibility of manufacturing large-throw, optically flat, high resolution and fast response-speed deformable mirrors (DM). The DM is a critical component in adaptive optics, which can be applied to improve medical imaging technology. The device consists of Segmented Membrane Arrays (SMA) and bottom electrodes with Backside Solder Bump (BSB) fabricated by micromachining technology. The design will use arrays of mirror pixels to eliminate the cross talk between adjacent elements. The mirror pixels will be made of stress-free single crystalline silicon (SCS) to ensure optically flat surfaces. The commercial application of this project will be in a number of areas, including bio imaging instruments, telescope systems, 3D data storage systems and free-space optical communications.