MRI: Acquisition of a Scanning Electron Microscope with Energy Dispersive Spectroscopy for Materials Characterization

在这个项目中，将获得一个具有能量色散X射线分析(EDX)的扫描电子显微镜(SEM)，作为一个新表征中心的锚定工具。圣何塞州立大学化学和材料工程系的材料表征和计量中心(简称[MC]2)将为该系以及工程和科学学院提供表征能力。教师和学生将使用该仪器进行本科生和研究生(MS级)研究项目，包括半导体加工、微电子机械系统(MEMS)开发、生物传感器开发、神经生物学研究、纳米复合材料和纳米线生长方面的工作。此外，显微镜还将用于各种工程和科学实验室课程以及外展活动。SJSU人员已经进行的大量研究项目将受到这一设施的影响。基于该大学位于硅谷的位置，以及与斯坦福纳米制造设施、NASA Ames研究中心、IBM Almaden研究中心和许多其他当地公司的网络，学生和教职员工正在从事从纳米技术到微型机电设备再到生物应用的重大研究项目。这项工作的更广泛影响包括每年访问上海州立大学并参加开放参观、发现工程营和劳动力发展学院的数百名高中生和社区大学生的活动，通过这些活动，他们的职业和大学选择受到影响。校园设施的改善带来的影响将是扩大了大量工科学生的培训机会，其中包括许多少数民族学生。

In this project, a scanning electron microscope (SEM) with energy dispersive x-ray analysis (EDX) will be acquired as the anchoring tool in a new characterization center. The Materials Characterization and Metrology Center (referred to as [MC]2 ) in the Chemical and Materials Engineering Department at San Jose State University, will provide characterization capabilities to the Department and the Colleges of Engineering and Science. Faculty and students will use the instrument for undergraduate and graduate (MS level) research projects, including work in semiconductor processing, microelectromechanical systems (MEMS) development, biosensors development, neurobiology research, nanocomposites and nanowires growth. In addition, the microscope will be used for a variety of engineering and science lab classes as well as outreach activities. A large number of research projects already being conducted by SJSU personnel will be impacted by this facility. Based on the university's location in Silicon Valley and the networks with Stanford Nanofabrication Facility, NASA Ames Research Center, IBM Almaden Research Center and many other local companies, students and faculty are engaged in significant research projects from nanotechnology to microelectromechanical devices to biological applications. The broader impact of the work includes activities through which the career and college choices are affected for hundreds of high school and community college students every year who visit SJSU and participate in Open House, Discover Engineering Camp and the Workforce Development Institute. The impact of improved facilities on campus will be in expanded training opportunities for a large number of engineering students, including many ethnic minority students.