Development of a Microelectronics Process Engineering Curriculum

微电子过程工程课程的开发

• 批准号: 9952707
• 负责人: Emily Allen
• 金额: $ 47.88万
• 依托单位: San Jose State University Foundation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-01-15 至 2003-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9952707&HistoricalAwards=false
• 关键词: Development; Microelectronics; Process; Engineering; Curriculum

Engineering - Materials Science (57) This project is developing courses, laboratory modules, and a faculty development workshop in support of an interdisciplinary curriculum to educate BS-level process engineers for microelectronics and related industries. This industry is comprised of companies which manufacture and package microelectronics products, semiconductor equipment, data storage devices, flat panel displays, analytical services and equipment, sensors and actuators, and increasingly, companies making microfluidic devices for onchip biological and chemical research. The goal of the project and the curriculum is to meet industry's need for bachelor's level process engineers with an interdisciplinary background. The focus of the curriculum is on process engineering, defined as the engineering resources needed to develop, maintain, monitor and evaluate the fabrication processes used in these industries. The interdisciplinary program draws from traditional materials, chemical, electrical and industrial engineering courses. Tying the program together are courses, internships and projects integrating and synthesizing specialized fabrication methods and manufacturing knowledge.The objectives of the project include the development of two interdisciplinary upper division laboratory courses, lower division laboratory module development, and a faculty development program for high school and community college educators. Significant funding collaborations exist with local industry and with the Maricopa Advanced Technology Education Center (MATEC) in Tempe, Arizona. An industry-funded fabrication facility is being designed to support the program. The proposed curriculum fills a niche for BS level process engineers that is not met by any other program in the U.S. and provides a model for programs at other universities in high technology areas.

工程-材料科学（57）该项目正在开发课程，实验室模块和教师发展研讨会，以支持跨学科课程，为微电子及相关行业培养BS级工艺工程师。该行业包括制造和包装微电子产品，半导体设备，数据存储设备，平板显示器，分析服务和设备，传感器和执行器的公司，以及越来越多的为芯片生物和化学研究制造微流体设备的公司。该项目和课程的目标是满足行业对具有跨学科背景的学士学位过程工程师的需求。该课程的重点是过程工程，定义为开发，维护，监控和评估这些行业中使用的制造工艺所需的工程资源。跨学科课程借鉴了传统的材料，化学，电气和工业工程课程。该项目的目标包括开发两门跨学科的高级实验室课程，低级实验室模块开发，以及为高中和社区大学教育工作者提供的教师发展计划。与当地工业和亚利桑那州滕佩的Marvila先进技术教育中心（MATEC）存在重大的资金合作。一个由工业界资助的制造设施正在设计中，以支持该计划。拟议的课程填补了一个利基BS级过程工程师，这是不符合任何其他程序在美国，并提供了一个模型，在其他大学的高科技领域的方案。