Development of a Virtual Reactor for Experiential Learning of Design of Experiments

目前，需要更有效的方法将实验设计（DOE）等统计方法整合到工程课程中。我们正在使用基于基础的化学气相沉积（CVD）的数值模拟来开发一个虚拟反应器，学生将在这里学习并实际应用DOE。有关的教育材料也正在编制之中。虚拟反应器的模拟基于传质和化学反应的基本原理，被附加的“噪声”所掩盖。然而，学生不能获得整个模型的输出，而是只能在晶圆片内的选定点以及他们决定“测量”的晶圆片之间的薄膜厚度。学生的评估将不仅基于反应堆的最终性能，而且基于实验的成本。虚拟反应堆可以让学生在使用DOE方法进行过程改进方面获得更广泛、更现实的体验——就像他们在操作一个实际的工业反应堆一样。西北地区教育实验室领导项目评估，而由来自学术界（俄勒冈州立大学，俄勒冈大学）和工业界（LSI Logic, Intel, WaferTech）的工程师和统计学家组成的五人咨询委员会。

Presently there is a need for more effective ways to integrate statistical methodologies such as Design of Experiments (DOE) into the engineering curriculum. We are using a fundamentals-based numerical simulation of chemical vapor deposition (CVD) to develop a virtual reactor where students will learn and then actually apply DOE. Associated educational materials are also being developed. The simulation of the virtual reactor is based on fundamental principles of mass transfer and chemical reaction, obscured by added "noise." However, rather than having access to the entire output of model, the film thicknesses are given to students only at the select points within the wafer and from wafer to wafer that they have decided to "measure." Student assessment will be based not only on the ultimate reactor performance but also on the cost of experimentation. The virtual reactor allows students a broader and more realistic experience in using the DOE methodology for process improvement - as if they were operating an actual industrial reactor. The Northwest Regional Educational Laboratory is leading the project evaluation while a five-member advisory committee consists of engineers and statisticians from academia (OSU, University of Oregon) and industry (LSI Logic, Intel, WaferTech).