Development of Wavelength Selective Emitters and Absorbers with Microfabricated Complex Gratings

摘要国家科学基金项目编号：cts -0500113项目负责人：张卓敏所属单位：佐治亚理工学院研究公司- GIT项目名称：基于微加工复杂光栅的波长选择性发射体和吸收体的开发。该项目由热传输和热处理项目资助，是化学和传输系统部门收到的一份主动提交的提案。本研究的目的是研究重掺杂硅的热辐射特性，以开发一维复杂光栅结构，从而控制热发射和吸收的光谱和方向行为。方法是将实验研究与理论建模相结合。利用傅里叶变换红外光谱仪（FTIR）和光谱双向反射计，在室温至900 K范围内测量0.4 ~ 20微米波长范围内不同微结构掺杂硅的透射率、反射率和发射率。利用硅微加工技术将开发复杂的光栅结构。严格的耦合波分析将用于预测微结构表面的辐射特性，以用于特定应用的结构设计和优化。通过这个项目将获得重掺杂硅辐射特性的温度依赖性的知识。可以控制辐射特性的工程表面的发展在用于能量转换的热光伏设备和用于遥感的红外探测器中具有重要应用。该研究的成功将进一步造福社会，为研究生和本科生提供微/纳米尺度热工的机会。PI计划通过引入微/纳米尺度的热现象和解决方法来加强本科热传递课程。

ABSTRACTNational Science FoundationProposal Number: CTS-0500113Principal Investigator: Zhang, ZhuominAffiliation: Georgia Tech Research Corporation - GIT Proposal Title: Development of a Wavelength Selective Emitters and Absorbers with Microfabricated Complex Gratings This proposal was received as an unsolicited submission to the Chemical and Transport Systems Division and was funded by the Thermal Transport and Thermal Processing Program. The objective of this research is to study the thermal radiative properties of heavily doped silicon for the development of one-dimensional complex grating structures, which allow the control of the spectral and directional behavior of thermal emission and absorption. The approach is to combine the experimental investigation with theoretical modeling. A Fourier-transform infrared (FTIR) spectrometer and a spectral bidirectional reflectometer will be used for measuring the transmittance, reflectance, and emittance of doped silicon with various microstructures at wavelengths between 0.4 and 20 micrometers, from room temperature to 900 K. Complex grating structures will be developed using silicon microfabrication technology. Rigorous coupled-wave analysis will be employed to predict the radiative properties of microstructured surfaces for the design and optimization of structures for specific applications. Knowledge of the temperature dependence of radiative properties of heavily doped silicon will be obtained through this project. Development of engineered surfaces that allow the control of radiative properties has important applications in thermophotovoltaic devices for energy conversion and infrared detectors for remote sensing. The success of the proposed research will further benefit the society by providing opportunities for graduate and undergraduate students in micro/nanoscale thermal engineering. The PI plans to enhance the undergraduate Heat Transfer course by introducing the micro/nanoscale thermal phenomena and solution methods.