SBIR Phase I: Laser Spectrometer for Semiconductor Yield Improvement

这项小型企业创新研究第一阶段的研究项目将确定一种新型激光光谱仪的性能和操作规范，该光谱仪适用于检测半导体加工工具中的微量水分。微量的水分污染对半导体制造的产量有不利的、昂贵的影响。这种传感器的大小和一罐苏打水差不多，可以在几秒钟内提供个位数的十亿分之一（ppb）的灵敏度，在一分钟内提供0.25 ppb的灵敏度。批量生产的估计价格点将比目前的微量水分传感器低四到五倍。完全开发的坚固原型将适用于检测各种有毒，腐蚀性或惰性工艺气体中的水分。显著提高的价格点将使半导体制造商能够在整个制造设施的每个工艺工具上部署传感器。如果成功，该项目将降低微电子半导体芯片的制造成本。该基础技术将扩展到其他痕量气体检测应用，包括生物医学呼吸诊断。在检测对健康、职业安全和全球变暖重要的痕量环境物种方面，其他应用比比皆是。所提出的传感器的性能和价格点将使科学研究人员在各个领域的发现广泛分布。

This Small Business Innovation Research Phase I research project will determine the performance and operating specifications for a new laser spectrometer suitable for detection of trace moisture at semiconductor process tools. Trace moisture contamination has an adverse, costly, effect on semiconductor manufacturing yields. The sensor will be about the size of a can of soda and provide single digit parts-per-billion (ppb) sensitivity in a few seconds, 0.25 ppb in under a minute. The estimated price point with volume production will be a factor of four to five lower than present trace moisture sensors. The fully developed rugged prototypes will be suitable for detection of moisture in a variety of toxic, corrosive or inert process gases. The significantly improved price point will enable semiconductor manufacturers to deploy the sensors on each process tool throughout the manufacturing facility. If successful this project will reduce the cost of manufacturing microelectronic semiconductor chips. The basic technology shall extend to other trace gas detection applications including biomedical breath diagnosis. Additional applications abound in detection of trace environmental species important to health, occupational safety, and global warming. The performance and price point of the proposed sensor will enable widespread distribution to scientific researchers in various fields of discovery.