MRI: Acquisition of NIL (Nanoimprint Lithography) System

这项提议的目标是微米和纳米级的复制过程，这是下一代纳米制造的主题。虽然许多研究工作都集中在有限数量的纳米结构和器件的制造上，但为了使技术真正适用于工程领域，必须寻求可靠的复制工艺。利用拟议的设备，将在MEMS制造、纳米光学、生物启发自组装和纳米微传感器等领域开展多学科主题的研究。教育和培训是该提案的重要组成部分。这一系统将利用两门研究生课程、一门本科生课程和一门社区大学课程。平均而言，每年将有20名研究生和40名本科生在使用这种设备进行纳米制造方面的实践经验。已计划对K-12学生和教师进行教育推广。将定期为外部用户举办讲习班，以培训佛罗里达州中部地区的劳动力。将建立在线预订系统和用户群体社区，以克服地域限制，方便外部用户访问。

This proposal targets a micro- and nanoscale replication process, which is the subject of next generation nanomanufacturing. Although many research works focus on the fabrication of limited number of nano structures and devices, for true adaptation of the techniques in the engineering field, a reliable replication process must be sought after. Using the proposed equipment, multidisciplinary themes in the areas of MEMS fabrication, nanooptics, bio-inspired self-assembly and nano-microsensor will be pursued. Education and training is an essential part of the proposal. Two graduate courses, one undergrad course and one community college course will be leveraged by this system. On an average, twenty graduate students and forty undergraduate students will have hands-on experience in nanofabrication using this equipment every year. Educational outreach for K-12 students and teachers has been planned. Workshops for external users will be held regularly to train workforces in the Central Florida area. An online reservation system and user group community will be set up to overcome geographical limitations and to facilitate the external user's access.