SGER: Nano-Heater Systems for Thermal Nanomanufacturing

本项目介绍了一种新颖的纳米热源/阀门概念，基于沉积在加工基板上的薄Ni和Al膜对的放热材料转化。在可寻址阵列或自定义布局系统中，这些被光刻成纳米级岛屿，用于原位，一次性局部快速加热。每个纳米加热元件的点火和控制都是通过夹在Ni-Al薄膜之间的薄电介质和纳米通道多孔夹层来单独实现的，通过相互连接的电激活来调节反应物的电动流动。该项目将通过制造、测试、基于模型的热识别、设计和控制，探索这种纳米加热器系统的初步可行性和实用性，以实现纳米尺度上指定的动态热处理分布。如果成功，纳米加热器将适用于多种热纳米制造工艺，特别是用于大规模加工聚合物衬底和纳米纤维膜的纳米模板工具，以及自主电源应用。另一方面，它们将成为许多纳米/微机电系统（N/MEMS）、纳米电机、生物医学设备等自主运行的机载电源。纳米加热器研究的广泛影响源于其与教育和培训活动的整合，通过课程材料和功能快速原型来追求，说明热加工的缩放规律。此外，它们源于该技术的技术优势，包括其制造简单性、可负担性、可扩展性、灵活性、能源效率和环境可持续性。

This project introduces a novel nano-heater source/valve concept, based on the exothermic material transformation of thin Ni and Al film pairs, deposited on the processed substrate. These are lithographically patterned into nanoscale islands in addressable arrays or custom layout systems, for in-situ, one-time localized rapid heating. Ignition and control of each nano-heater element is individually effected through thin dielectric and nano-channelled porous interlayers sandwiched between the Ni-Al films, by regulating the electrokinetic flow of reactants via interconnected electrical activation. This project will explore preliminary feasibility and utility of such nanoheater systems, by fabrication, testing, model-based thermal identification, design and control, to achieve specified dynamic thermal processing distributions at the nanoscale. If successful, the nanoheaters will be suitable for multiple thermal nanomanufacturing processes, especially in nanotemplated tools for massive processing of polymer substrates and nanofiber membranes, and autonomous power applications. On the other hand, they would be valuable as on-board power sources for autonomous operation of numerous nano/micro-electromechanical systems (N/MEMS), nanomotors, biomedical devices etc. Broader impacts of nano-heater research emanate from its integration with education and training activities, to be pursued via curricular materials and functional rapid prototypes, illustrating the scaling laws of thermal processing. In addition, they stem from the technical benefits of the technology, including its manufacturing simplicity, affordability, scalability, flexibility, energy efficiency and environmental sustainability.