VIrtual TEst STructure (VITEST)

Prop ID：ccf-0541297 PI：Maly，Wojciech Institution：Carnegie-Mellon University标题：虚拟测试结构(VITEST)摘要现代集成电路(IC)由非常小的元件组成，其中一些元件可能太小，无法在每个制造的器件上正确制造。现代IC制造的艺术是选择这样的小型化IC元件(通常是晶体管)，它将现有技术推向极限，即达到这样一个阶段，即正确工作的已制造IC的数量是可以接受的，同时单个IC中的元件数量尽可能多(通过使它们尽可能小)。为了达到这样的平衡，人们必须了解导致IC故障的具体情况。通常，这种知识是通过使用专用测试结构来获得的，这种测试结构被制造而不是普通IC，因此浪费了非常昂贵的制造能力。该项目研究的核心思想是利用IC产品本身来校准制造成品率模型。这些模型构成了评估IC故障概率的方法基础。

Prop ID: CCF-0541297 PI: Maly, Wojciech Institution: Carnegie-Mellon University Title: VIrtual TEst STructure (VITEST) AbstractModern Integrated Circuits (ICs) are built of elements so small that some of them may be too small to be fabricated correctly on everyone fabricated device. Art of modern IC manufacturing is in choosing such scale of miniaturization IC elements (typically transistors) that pushes available technology to its limits, i,e, to the stage in which number of fabricated ICs that work correctly is acceptable and at the same time the number of elements in a single IC as large as possible (by making them as small as possible).To achieve such a balance one must understand specific circumstances causing IC malfunction. Typically such knowledge is acquired by using special purpose test structures, which are fabricated instead of normal IC and therefore are wasting very expensive manufacturing capacity. The key idea of the research covered by this project is in the use of IC products themselves for calibration of manufacturing yield models. These models form a foundation of methodologies used for assessment probability of IC malfunctions.