Feasibility of a Novel Three-Dimensional Nano-Manufacturing Technique: Nanomilling

2007-12-13-07探索性研究小额赠款(SGER)奖支持开发一种新的纳米制造技术--纳米研磨，用于在纳米尺度上创建三维形状。该项目的具体目标是(1)开发纳米研磨技术和相关的试验台，以及(2)通过在不同操作条件下进行实验来评估该技术的尺寸、形状和材料性能。纳米加工技术本质上是机械的，形状的产生将通过去除不需要的材料来实现。将设计和建造纳米加工设备，并使用纳米级原子力显微镜探头作为工具。刀尖运动将被高精度地控制，以选择性地去除工件材料，以产生各种凸凹形，如槽、壁和口袋。教育目标包括让研究生和本科生参与纳米制造研究，并将研究成果转化为课堂，将他们纳入皮？S新开设的名为？微/纳米制造的课程。卡内基梅隆大学和匹兹堡公立学校的现有基础设施将被用来吸引高中生和教师从事纳米制造研究。如果成功，这项研究将通过扩大目前的纳米级形状生成能力来推动纳米技术领域的发展。这项技术有可能克服目前的限制，并极大地提高目前的纳米制造能力。纳米加工技术的好处将包括能够创造任意的三维形状，应用于各种材料选择，设计简单到纳米制造，以及能够集成到现有的微和纳米制造技术中。将纳米加工工艺与其他纳米制造工艺相结合，也有可能在生产能力和几何性能之间找到最佳的折衷。此外，其低成本和简单性将允许通过并行操作进行体积放大。该项目还将有助于在纳米尺度上理解材料特性和力学行为。所开发的技术将对纳米流体、纳米电子、纳米医学、纳米机电系统和纳米机器人等新兴领域产生重要影响，从而对美国在纳米制造方面的竞争力产生积极影响。

12-13-07This Small Grant for Exploratory Research (SGER) award supports the development of a novel nanomanufacturing technique, nanomilling, for creating three-dimensional shapes at the nano scale. The specific objectives of the project are (1) to develop the nanomilling technique and associated testbed, and (2) to assess the size, shape, and material capability of the technique by conducting experiments under varying operational conditions. The nanomilling technique is mechanical in nature, where the shape generation will be achieved by removing unwanted material. Nanomilling equipment will be designed and constructed, and nano-scale atomic force microscope probe tips will be used as tooling. The tip motion will be controlled with high precision to selectively remove the workpiece material to create various convex and concave shapes, such as slots, walls, and pockets. The educational objectives include involving graduate and undergraduate students in nanomanufacturing research and transferring the research findings to classroom by incorporating them into the PI?s new course titled ?micro/nano-manufacturing.? The existing infrastructure of Carnegie Mellon University and Pittsburgh public schools will be utilized to attract high-school students and teachers to nanomanufacturing research. If successful, the research will advance the field of nanotechnology by expanding current capabilities of nano-scale shape generation. The technique has po­tential to overcome current limitations, and dramatically advancing current nanomanufacturing capa­bility. Benefits of the nanomilling technique will include capability of creating arbitrary three-dimensional shapes, application to a diverse selection of materials, simplicity in design to nanomanufacturing, and capacity to be integrated into existing micro and nanomanufacturing techniques. Integration of the nanomilling process with other nanomanufacturing processes may also make it possible to find the best trade-off between the throughput and geometric capability. Furthermore, its low cost and simplicity will allow volumetric scale-up via parallel operation. The project will also contribute to the understanding of material characteristics and mechanics behavior at the nano scale. The developed technique will have an important impact on emerging fields of nano-fluidics, nano-electronics, nano-medicine, nano-electromechanical systems, and nano-robotics, thereby positively impacting the competitiveness of the U.S. in nanomanufacturing.