NER: Massively Parallel Optomechanical Operation of Distributed Nanoelectromechanical Systems (NEMS) Arrays

本研究的目的是使纳米机电系统的分布式阵列的快速，并行操作。该方法是使用调制的激光源同时致动纳米机械谐振器阵列。使用全场光学干涉测量系统确定每个阵列元件的位移。该系统中的信号处理是光学地进行的，使得通过谐振器运动引起的光学探测光束的相位调制被下变频为低频强度调制并在电荷耦合器件上读出。在相机上的每个像素处测量的强度调制与样品表面上的对应点处的表面运动成正比，从而允许获取装置的位移图。研究人员将制造大型纳米机械谐振器阵列，设计和构建一个全视场光学检测系统，并使用该设备演示阵列的并行操作。 智力优点：这项研究解决了下一代纳米机电系统开发中最重要的实验挑战之一：并行操作。并行操作对于基于传感器、信号处理器和计算机的未来纳机电系统至关重要。该方法也将代表纳米级光学计量学的重大发展。 更广泛的影响：此外，研究人员将为当地高中开发一个新的“科学星期六”计划，让学生获得纳米科学和激光传感器的实践经验。研究人员还将通过纳米力学（致动和传感）和固体力学实验技术（光学计量学）课程将研究成果纳入研究生课程。

The objective of this research is to enable rapid, parallel operation of distributed arrays of nanoelectromechanical systems. The approach is to simultaneously actuate arrays of nanomechanical resonators using a modulated laser source. The displacement of each array element is determined using a full-field optical interferometry system. The signal processing in this system is done optically, such that the phase modulation of an optical probe beam, induced through the resonator motion, is down-converted to a low-frequency intensity modulation and read out on a charge-coupled device. The intensity modulation measured at each pixel on the camera is directly proportional to the surface motion at the corresponding point on the sample surface, allowing for the acquisition of a displacement map of the devices. The investigators will fabricate large arrays of nanomechanical resonators, design and build a full field optical detection system, and demonstrate parallel operation of arrays using this device. Intellectual Merit:This research addresses one of the most significant experimental challenges in the development of the next generation nanoelectromechanical systems: parallel operation. Parallel operation is crucial for future nanoelectromechanical systems based sensors, signal processors and computers. The approach will also represent a significant development in nanoscale optical metrology. Broader Impact:In addition, the investigators will develop a new "Science Saturday" program for local high schools, allowing students to get hands-on experience in nanoscale science and laser-based sensors. The investigators will also incorporate the research results into graduate level coursework through courses on Nanomechanics (actuation and sensing) and Experimental Techniques in Solid Mechanics (optical metrology).