NER: Photoacoustic Characterization of Nanoelectromechanical Systems

NER：纳米机电系统的光声表征

• 批准号: 0304446
• 负责人: Todd Murray
• 金额: $ 10万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-07-01 至 2005-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0304446&HistoricalAwards=false
• 关键词: NER; Photoacoustic; Characterization; Nanoelectromechanical; Systems

In this proposal, we will develop high-resolution photoacoustic techniques for generating and detecting acoustic vibrations in nanoscale systems and demonstrate the feasibility of this system in the characterization of doubly clamped NEMS beam resonators.The current NER proposal seeks to overcome these resolution problems in photoacoustic microscopy and demonstrate its applicability to nanometer scale devices: NEMS. To accomplish this, we will develop an optical near-field photoacoustic microscopy system that will allow us to generate and detect acoustic and thermal vibrations in NEMS devices. This system will have a modulated CW laser (up to 5 GHz) for excitation and a CW probe laser will be used to monitor the local displacement and temperature, respectively. High spatial resolution will be obtained by incorporating a high refractive index solid immersion lens (SIL) to overcome the diffraction limit in air. The SIL based technique is well suited for the generation and detection of acoustic waves in NEMS devices because it allows for reduction of laser spot size below the diffraction limit in air while maintaining the optical throughput necessary for high sensitivityinterferometric detection. The proposed research effort is aimed at evaluating this experimental technique, which will act as an enabling technology and help answer fundamental questions regarding the energy flow through these devices.This NER effort will allow for an initial feasibility study on high-resolution photoacoustic microscopy of NEMS and provide the foundation for future development of near-field optical probes for the generation and detection of acoustic phonons in nanoscale structures. Graduate student support is also included in this effort. The students will have a truly interdisciplinary educational experience and receive training in the areas of near-field optics, acoustics, and nanoscale mechanics. This NER specifically addresses the following themes:

在本提案中，我们将开发高分辨率光声技术，用于在纳米级系统中生成和检测声振动，并证明该系统在双钳位 NEMS 梁谐振器表征中的可行性。当前的 NER 提案旨在克服光声显微镜中的这些分辨率问题，并证明其对纳米级器件：NEMS 的适用性。为了实现这一目标，我们将开发一种光学近场光声显微镜系统，使我们能够在 NEMS 设备中生成和检测声振动和热振动。该系统将采用调制 CW 激光器（高达 5 GHz）进行激励，并使用 CW 探针激光器分别监测局部位移和温度。通过采用高折射率固体浸没透镜（SIL）克服空气中的衍射极限，可以获得高空间分辨率。基于 SIL 的技术非常适合 NEMS 设备中声波的生成和检测，因为它可以将激光光斑尺寸减小到空气中的衍射极限以下，同时保持高灵敏度干涉检测所需的光学吞吐量。拟议的研究工作旨在评估这项实验技术，该技术将作为一种使能技术，并帮助回答有关通过这些设备的能量流的基本问题。这项NER工作将允许对NEMS的高分辨率光声显微镜进行初步可行性研究，并为未来开发用于在纳米级结构中产生和检测声子声子的近场光学探针奠定基础。研究生支持也包括在这项努力中。学生将获得真正的跨学科教育体验，并接受近场光学、声学和纳米力学领域的培训。该 NER 具体解决以下主题：