SGER: Exploratory Theoretical Study of Differential Surface Charging of Nanopatterned Dielectric Materials

获奖编号：CTS-0650536主要研究者： Gyeong HwangAffiliation：德克萨斯大学提案标题：SGER：纳米图案化介电材料的差分充电的探索性理论研究这项工作的主要目标是确定纳米尺度如何影响表面充电的等离子体处理问题。 当电荷在暴露的绝缘表面上积聚时，入射离子的能量、通量和轨迹会被改变，从而阻止或扭曲它们应该实现的过程。 这个问题已经研究了以前在连续尺度的轨迹方法。 然而，在纳米尺度下，单个离子在加入表面时也会影响局部电场。 该特征及其周围的特征可能会受到影响，特别是包括沟槽。 将使用的技术是相当完善的，但纳米级扭曲的问题尚未探讨。 如果它被证明是重要的，它将导致一系列需要进一步解决的技术和科学挑战。

Award Number: CTS-0650536Principal Investigator: Gyeong HwangAffiliation: University of TexasProposal Title: SGER: Exploratory Theoretical Study of Differential Charging of Nanopatterned Dielectric MaterialsThis main objective of this work is to determine how nanoscale dimensions affect the plasma processing problem of surface charging. As charges build up on an exposed insulating surface, the energy, flux, and trajectory of incoming ions can be altered, preventing or distorting the process they are supposed to achieve. This problem has been studied previously at the continuum scale by trajectory methods. However, at the nanoscale, a single ion can also affect the local electric field when it joins the surface. That feature and features around it may be affected, particularly including trenches. The techniques that will be used are reasonably well established, but the question of nanoscale distortions has not been explored. If it proves significant, it would lead to a range of technological and scientific challenges to be addressed further.