Chipscale Multifinger Coordinated Manipulation Methodology for Nanomanufacturing

本研究的主要目标是：(I)研究一种通过多个微尺度手指的协调动作来操纵微/纳米尺度物体的新方法的问题、技术和原理，以及(Ii)实现一个能够在衬底上指定的工作空间区域内进行抓取、旋转、点到点移动和定位微尺度物体等协调操纵任务的多指微操作手。该方法包括合成由多个独立致动的柔顺微机构和末端执行器组成的芯片级装置，所述末端执行器可以被引导到工作空间内的任何关注点，以通过适当地控制输入致动来接触和与微尺度对象交互。这种方法包括通过从刚体和柔体运动学和动力学的基本原理以及有限元方法建立详细的模型来理解协调微操作的运动学和力学以及必要的输入驱动方案。这项研究利用了宏观机器人、微纳米物理、柔顺机构、微系统和微制造等学科的交叉知识。如果这项研究成功，可能会导致一种新的芯片规模的微操作器，具有灵活操纵微/纳米物体的先进能力，从而提供几个潜在的好处和更广泛的影响，包括：(I)先进的纳米制造技术，以建立复杂的微/纳米机电系统；(Ii)通过一系列微操作器促进大规模的纳米制造，以及(Iii)通过用更灵活的微操作器取代简单的悬臂梁末端操作器来改进扫描电子显微镜和原子力显微镜中的仪器。这项研究在教育方面的更广泛影响包括为高中生提供几个探究性学习机会，为本科生和研究生提供研究机会，包括代表人数不足的群体和少数群体，在线传播教育材料，将研究中出现的新主题，如纳米制造和微/纳米机器人学纳入本科生和研究生课程。

The main objectives of this research are: (i) to investigate the issues, techniques and principles of a novel methodology to manipulate micro/nano-scale objects by means of coordinated action of multiple micro-scale fingers, and (ii) to realize a multifingered micromanipulator capable of coordinated manipulation tasks such as grasp, rotate, move point-to-point and position micro-scale objects in a defined workspace area on a substrate. The approach involves synthesizing a chip-scale device comprised of multiple independently actuated compliant micromechanisms with optimized topology and end effectors that can be guided to any point of interest within the workspace to contact and interact with a micro-scale object by suitably controlling the input actuations. The approach includes understanding the kinematics and mechanics of coordinated micromanipulation and necessary input actuation schemes through detailed models derived from the first principles of rigid-body and flexible-body kinematics and dynamics as well as the finite element method. The research exploits the interdisciplinary knowledge of macro-scale robotics, micro/nano-scale physics, compliant mechanisms, microsystems and microfabrication.This research, if successful, could lead to a new chip-scale micromanipulator with advanced capabilities for dexterous manipulation of micro/nano-scale objects and thus offer several potential benefits and broader impacts including: (i) advancement of the nanomanufacturing technology for building complex micro/nano electromechanical systems, (ii) facilitation of large-scale nanomanufacturing via an array of micromanipulators, and (iii) advancement of the instrumentation in the scanning electron microscopy and the atomic force microscopy by replacing simple cantilever end effectors with more dexterous micromanipulators. The broader impacts in terms of educational aspects of this research include providing several inquiry-based learning opportunities to high school students and research opportunities to undergraduate and graduate students including underrepresented and minority groups, online dissemination of education materials, integration of emerging topics from the research such as nanomanufacturing and micro/nano robotics in undergraduate and graduate level courses.