MRI: Acquisition of a Micro Scanning Vibrometer System

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The Objective of the Proposed ActivityThe objective of this proposal is to acquire the Polytec PI Micro Scanning Vibrometer (MSV-300)for research and educational use at the University of Illinois at Chicago (UIC). The MicroScanning Vibrometer (MSV) is an ideal instrument for mapping the deflections ofMicroelectromechanical Systems (MEMS) structures. Employing state-of-the-art lasertechnology and a computer software driven data acquisition system, the instrument can measureacceleration, velocity and displacement of points on tiny vibrating microstructures, and providelive 3-D animations of the response mode shapes of the microstructures. The MSV includes two-channelFFT data acquisition, a fiber-optic vibrometer sensor, microscope adapter, piezo-scanningsystem, remote control functions and specialized software.The Intellectual Merit of the Proposed ActivityFour laboratories in three engineering departments at UIC are actively involved in sponsoredresearch projects on development of a variety of novel MEMS transducers, many of them incollaboration with various departments in the UIC Medical school, that correspond to over$3.5M in grants (either funded or pending) from various federal agencies including NSF.Examples of these novel MEMS projects include actuators and microfluidic devices for sub-retinalprosthesis, medical diagnostic vibro-acoustic sensors, multi-channel neural probes, andliquid drop actuated micro-mirrors. The feature sizes of these MEMS are on the order of a fewmicrometers and their resonant frequencies are on the order of a few Hertz to several MHz. Avery important component central to all of these research projects is the identification of systemdynamics, which presents many difficult challenges. Due to the micro scale of these structures,conventional dynamic characterization methods are not feasible. Coarse frequency evaluationsmay be possible in some cases using certain single-point optical sensors; however, they are notpractical for obtaining detailed mode shape data of the test specimen. Additionally, they arelimited by bandwidth and resolution. Currently no instruments are available at UIC or nearbyinstitutions to fully characterize the dynamic behavior of MEMS structures in these projects.Broader Impacts of the Proposed ActivityThe proposed equipment will significantly impact the quality of research and education, anddiversity programs at UIC, and also the advancement of local institutions and private companies:Research MSV would enable UIC researchers to acquire high quality modal data in MEMSstructures that is not possible by any other technique, and thus, significantly enhance the qualityof the ongoing and anticipated future research. It would also help catalyze new research activity.Education The equipment will be used to offer hands-on instruction in cutting-edge technologyto supplement classroom theory taught in many existing and new courses planned in the areas ofdynamics and MEMS testing at UIC; this will highly enrich the quality of education.Diversity UIC offers special programs at both the undergraduate and graduate level to attract andmentor members of underrepresented groups in the sciences and engineering. The availability ofequipment would further enrich the education of students in these programs.Industry The Microfabrication Applications Laboratory at UIC is currently used by over 50external users from several local academic institutions and companies in the greater Chicagoarea. Many of the users have expressed interest and need for the proposed MSV. This equipmentwill foster more partnerships with local industry, promote innovation in MEMS/nanotechnology,and help local businesses to contribute to economic development in the Midwest.