MRI: Acquisition of a Micro Scanning Vibrometer System

拟议活动的目标本提案的目标是在伊利诺伊大学芝加哥分校(UIC)购买Polytec PI微型扫描振动仪(MSV-300)，用于研究和教育用途。微扫描测振仪(MSV)是测量微电子机械系统(MEMS)结构挠度的理想仪器。该仪器采用最先进的激光技术和计算机软件驱动的数据采集系统，可以测量微小振动微结构上点的加速度、速度和位移，并提供微结构响应振型的三维动画。MSV包括双通道FFT数据采集、光纤振动传感器、显微镜适配器、压电扫描系统、远程控制功能和专门软件。拟议活动的智力价值UIC的三个工程部门的四个实验室积极参与各种新型MEMS换能器的自发研究项目，其中许多是与UIC医学院的不同部门合作的，这些项目相当于包括NSF在内的各种联邦机构提供的超过350万美元的拨款(无论是资助的还是等待资助的)。这些新颖的MEMS项目的例子包括用于亚视网膜假体的执行器和微流控设备、医疗诊断声学传感器、多通道神经探头和液滴致动微镜。这些MEMS的特征尺寸在几微米量级，其谐振频率在几赫兹到几兆赫的数量级。对所有这些研究项目来说，一个非常重要的核心组成部分是系统动力学的识别，这带来了许多困难的挑战。由于这些结构的微尺度，传统的动态表征方法并不可行。在某些情况下，可以使用某些单点光学传感器进行粗略的频率评估；但是，对于获得试件的详细振型数据来说，这是不现实的。此外，它们还受到带宽和分辨率的限制。目前，UIC或附近机构还没有仪器来完全表征这些项目中MEMS结构的动态行为。拟议活动的广泛影响拟议的设备将显著影响UIC的研究和教育质量、多样性计划，以及当地机构和私营公司的进步：研究MSV将使UIC研究人员能够获得任何其他技术无法获得的MEMS结构中的高质量模态数据，从而显著提高正在进行和预期的未来研究的质量。这也将有助于促进新的研究活动。教育该设备将用于提供尖端技术的实践教学，以补充UIC在动力学和MEMS测试领域的许多现有课程和计划中的新课程中教授的课堂理论；这将极大地丰富教育质量。多样性UIC在本科生和研究生水平提供特别课程，以吸引和指导科学和工程领域中代表性不足的群体成员。设备的可获得性将进一步丰富学生在这些项目中的教育。工业UIC的微制造应用实验室目前由来自大芝加哥地区几个当地学术机构和公司的50多名外部用户使用。许多用户表达了对拟议的MSV的兴趣和需求。该设备将与当地行业建立更多的合作伙伴关系，促进MEMS/纳米技术的创新，并帮助当地企业为中西部的经济发展做出贡献。

The Objective of the Proposed ActivityThe objective of this proposal is to acquire the Polytec PI Micro Scanning Vibrometer (MSV-300)for research and educational use at the University of Illinois at Chicago (UIC). The MicroScanning Vibrometer (MSV) is an ideal instrument for mapping the deflections ofMicroelectromechanical Systems (MEMS) structures. Employing state-of-the-art lasertechnology and a computer software driven data acquisition system, the instrument can measureacceleration, velocity and displacement of points on tiny vibrating microstructures, and providelive 3-D animations of the response mode shapes of the microstructures. The MSV includes two-channelFFT data acquisition, a fiber-optic vibrometer sensor, microscope adapter, piezo-scanningsystem, remote control functions and specialized software.The Intellectual Merit of the Proposed ActivityFour laboratories in three engineering departments at UIC are actively involved in sponsoredresearch projects on development of a variety of novel MEMS transducers, many of them incollaboration with various departments in the UIC Medical school, that correspond to over$3.5M in grants (either funded or pending) from various federal agencies including NSF.Examples of these novel MEMS projects include actuators and microfluidic devices for sub-retinalprosthesis, medical diagnostic vibro-acoustic sensors, multi-channel neural probes, andliquid drop actuated micro-mirrors. The feature sizes of these MEMS are on the order of a fewmicrometers and their resonant frequencies are on the order of a few Hertz to several MHz. Avery important component central to all of these research projects is the identification of systemdynamics, which presents many difficult challenges. Due to the micro scale of these structures,conventional dynamic characterization methods are not feasible. Coarse frequency evaluationsmay be possible in some cases using certain single-point optical sensors; however, they are notpractical for obtaining detailed mode shape data of the test specimen. Additionally, they arelimited by bandwidth and resolution. Currently no instruments are available at UIC or nearbyinstitutions to fully characterize the dynamic behavior of MEMS structures in these projects.Broader Impacts of the Proposed ActivityThe proposed equipment will significantly impact the quality of research and education, anddiversity programs at UIC, and also the advancement of local institutions and private companies:Research MSV would enable UIC researchers to acquire high quality modal data in MEMSstructures that is not possible by any other technique, and thus, significantly enhance the qualityof the ongoing and anticipated future research. It would also help catalyze new research activity.Education The equipment will be used to offer hands-on instruction in cutting-edge technologyto supplement classroom theory taught in many existing and new courses planned in the areas ofdynamics and MEMS testing at UIC; this will highly enrich the quality of education.Diversity UIC offers special programs at both the undergraduate and graduate level to attract andmentor members of underrepresented groups in the sciences and engineering. The availability ofequipment would further enrich the education of students in these programs.Industry The Microfabrication Applications Laboratory at UIC is currently used by over 50external users from several local academic institutions and companies in the greater Chicagoarea. Many of the users have expressed interest and need for the proposed MSV. This equipmentwill foster more partnerships with local industry, promote innovation in MEMS/nanotechnology,and help local businesses to contribute to economic development in the Midwest.