MRI: Acquisition of a Laser Lithography Tool

摘要：本研究的目的是开发低成本的电子产品，用于医疗诊断和环境安全的传感器，以及新型固态存储器件。方法是使用直接写入或无掩模光刻技术快速和廉价的原型设备设计。因此，提出了一种能够在光阻涂层基板上直接书写图案的激光光刻工具。目前，太平洋西北地区的任何一所大学都没有类似的工具。智力优势：研究跨越多个领域，包括透明和印刷电子电路的制造，碳纳米管的电学性质的研究，以及磁性薄膜中表面声波的物理理解。建议购买的设备非常适合支持大学的研究需求-它提供经济，亚微米光刻，易于使用和维护。更广泛的影响：该工具将被指定为共享资源，供区域学术机构和小型企业用于研究和教育。它将促进电子、流体和机械设备微加工方面的广泛研究活动。在洁净室工作的研究生和本科生将获得口罩设计、布局和制造方面的经验。该设备也是教育创新不可或缺的，包括微机电系统（MEMS）制造，计划在本科微处理实验室。主要研究人员将参加由俄勒冈州立大学协调的夏季推广项目，向高中和少数族裔学生展示微加工工具和技术。

NSF Program: MRI PI: Pallavi DhagatMRI: Acquisition of a Laser Lithography ToolAbstract:The objective of this research is to develop low-cost electronics, sensors for medical diagnostics and environmental safety, and novel solid-state memory devices. The approach is to use direct write or maskless lithography techniques for rapid and inexpensive prototyping of device designs. Thus, the acquisition of a laser lithography tool capable of directly writing patterns on a photo-resist coated substrate is proposed. Presently, there is no equivalent tool at any of the Pacific Northwest universities.Intellectual Merit: The research spans diverse areas, including fabrication of transparent and printed electronic circuits, investigation of electrical properties of carbon nanotubes, and understanding of the physics of surface acoustic waves in magnetic thin films. The equipment proposed for acquisition is ideally suited to support research needs at a university - it provides economical, sub-micron lithography with ease of use and maintenance.Broader Impact: The tool will be designated as a shared resource, available to regional academic institutions and small businesses for research and education. It will facilitate a broad range of research activities in the microfabrication of electronic, fluidic and mechanical devices. Graduate and undergraduate students assisting in the cleanroom will gain experience in mask design, layout and fabrication. The equipment is also indispensable to the educational innovations, including micro-electromechanical systems (MEMS) fabrication, planned in the undergraduate microprocessing laboratories. The principal investigators will participate in the summer outreach programs coordinated by Oregon State University to expose high-school and under-represented minority students to microfabrication tools and techniques.