Use of Novel Excitation Schemes for Resonant Microcantilevers in Liquid-Phase Sensing Applications

摘要：本研究的目标是开发高效、高灵敏度的谐振式微悬臂梁传感器，用于液(生物)化学传感应用，通过适当的设计降低流体阻尼和有效流体质量，从而提高传感器的灵敏度和分辨率。方法是利用最优的悬臂梁几何形状和更一般的激励特性。具体地说，将研究横向弯曲模式。使用面内力而不是面外力展示了如何使用机电负载特性的智能控制来大幅提高性能，即使在液体中也是如此。其智力优势在于对振动微结构(悬臂梁)和周围流体之间的耦合有更基本的理解。开发的分析模型将最终指导更有效的微型传感器的设计，不仅适用于这里所针对的生化传感应用，而且适用于在非真空环境中工作的谐振式传感器。更广泛的影响源于改进的悬臂式传感平台的可用性，作为液态(生物)化学传感的传感平台，以及作为耦合设备物理、最先进的微制造、传感器技术和系统工程的教育工具。在传感系统方面，在液相中性能提高高达两个数量级可能真正具有变革性，使新型手持传感系统的开发成为可能，应用范围涵盖环境监测、危险化合物检测和医疗诊断。在教育方面，悬臂是最简单的微结构之一，因此非常适合研究生和本科生培训以及K-12推广计划。

RE: Proposal 0824017Use of Novel Excitation Schemes for Resonant Microcantilevers in Liquid-Phase Sensing Applications.ABSTRACT:The objective of this research is to develop efficient and highly sensitive resonant microcantilever sensors for liquid-phase (bio)chemical sensing applications by reducing fluid damping and effective fluid mass through proper design and, thus, improving the sensitivity and resolution of the sensor. The approach is to utilize optimal cantilever geometries and more general excitation characteristics. Specifically, the lateral bending mode will be investigated. The use of in-plane rather than out-of-plane forces demonstrates how the intelligent control of electromechanical load characteristics may be used to drastically enhance performance, even in liquids.The intellectual merit lies in a more fundamental understanding of the coupling between a vibrating microstructure (cantilever beam) and the surrounding fluid. The developed analytical models will ultimately guide the design of more efficient microsensors, not only for the bio-chemical sensing applications targeted here, but for resonant sensors operating in a non-vacuum environment in general. The broader impact stems from the availability of the improved cantilever-based sensing platforms as a sensing platform for liquid-phase (bio)chemical sensing and as an educational tool coupling device physics, state-of-the-art microfabrication, sensor technology and systems engineering. On the sensing system side, a performance improvement of up to two orders of magnitude in the liquid phase could be truly transformative, enabling the development of novel handheld sensing systems for applications spanning environmental monitoring, detection of hazardous compounds, and medical diagnosis. On the educational side, cantilevers represent one of the simplest microstructures and are thus ideally suited for graduate and undergraduate student training and K-12 outreach programs.