SBIR Phase I: A Detector for Co-Axial Micro-focused Ion Beams for Detection of Backscattered Ions and Secondary Electrons from semi-conducting surfaces

这个小企业创新研究第一阶段的项目是开发一个二次电子探测器，它可以与微聚焦离子束同轴安装。后向散射的中性原子（和离子）和二次电子将进行分析，以给出表面元素位置和身份的测量。该探测器将使独特类型的二次离子质谱。电子和负背散射离子可以进行能量和时间分析，从而给出被检测表面的空间分辨元素图像。与二次电子显微镜相比，光束损伤大大减少，允许其在生物样品上使用。该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的。

This Small Business Innovation Research Phase I project is to develop a secondary electron detector which can be co-axially mounted with a micro-focused ion beam. Backscattered neutral atoms (and ions) and secondary electrons will be analyzed to give a measure both of surface element location and identity. This detector will enable unique types of secondary ion mass spectrometry. The electrons and negative backscattered ions can be energy and time analyzed to give a spatially resolved elemental image of the surface under examination. Beam damage is greatly reduced compared to secondary electron microscopy allowing its use on biological samples.This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).