SBIR Phase I: Chip-Scale Micromechanical Gyroscope for Angular Roation Detection, Stability and Control

该小型企业创新研究（SBIR）第一阶段项目将开发一种振动陀螺仪，该陀螺仪具有0.1 - 1 MHz的静电驱动和电容（或压电）检测，频率比当前商用MEMS陀螺仪使用的频率高得多，品质因数超过1000。由于高频率，热约翰逊噪声（其通常定义标准微机械陀螺仪的噪声基底）被显著地降低了几个数量级。所提出的技术涉及双模式方法，其中驱动力被施加在谐振器的一个模式中。在外部旋转下，该模式耦合到第二模式，该第二模式通过静电或压电技术检测。使用这种方法，可以实现微米尺寸的芯片级陀螺仪，在晶圆级上制造，与高端战术级陀螺仪相比，具有性能参数。微机械振动陀螺仪在惯性导航系统和汽车应用中具有越来越大的相关性。除了这些需要具有更好灵敏度和性能参数的设备的应用之外，消费电子产品中的许多新应用突然出现。特别地，诸如蜂窝设备和GPS系统的手持设备以及诸如任天堂Wii的游戏控制台现在包括微型陀螺仪作为现有微机械加速度计的低成本伴侣。这些应用本质上类似于汽车应用，其中陀螺仪用于检测角旋转并提供行驶稳定性、翻滚检测和更好的牵引力控制。高灵敏度高稳定性微机械陀螺仪的发展也将是重要的一些基础研究问题，其中包括测量引力红移验证广义相对论的预测。作为惯性系统，可以冷却到低温的高灵敏度陀螺仪也可以用于检测或限制新的基本自旋相关力。“该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的。"

This Small Business Innovation Research (SBIR) Phase I project will develop a vibratory gyroscope with electrostatic actuation and capacitive (or piezoelectric) detection at 0.1 - 1 MHz, a much higher frequency than the ones used by current commercial MEMS gyroscopes and with quality factors exceeding 1000. Because of the high frequencies, the thermal Johnson noise (which typically defines the noise floor for standard micromechanical gyroscopes) is reduced considerably by orders of magnitude. The proposed technology involves a two-mode approach in which the drive force is applied in one mode of the resonator. Under external rotation, this mode is coupled to a second mode, which is detected, either by electrostatic or piezoelectric technique. Using this approach, it is possible to achieve micron-sized chip-scale gyroscopes, manufactured on wafer scale, with performance parameters compared to high-end tactical grade gyroscopes. Micromechanical vibratory gyroscopes have increasing relevance in inertial navigation systems and automotive applications. Beyond these applications which require devices with better sensitivity and performance parameters, a host of new applications in consumer electronics have suddenly emerged. In particular, hand-held devices such as cellular devices and GPS systems, and gaming consoles such as the Nintendo Wii are now including miniature gyroscopes as low cost companion to existing micromachined accelerometers. These applications are in essence similar to the automotive applications in which the gyroscopes are used to detect angular rotation and provide ride stabilization, roll over detection and better traction control. Development of high sensitivity high stability micromechanical gyroscopes will also be of importance to a number of fundamental research questions, which include measuring gravitational red shift for validating the predictions of general relativity. As an inertial system, a highly sensitive gyroscope that can be cooled down to low temperatures can also be used to detect or put limits on new fundamental spin-dependent forces."This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)."