SBIR Phase I: Synthesis of Hard Magnetic Nanoparticles and Fabrication of Micromagnets for MEMS Applications

这个小型企业创新研究第一阶段项目计划开发基于稀土过渡金属化合物的各向异性硬磁纳米颗粒，颗粒尺寸在200 nm到100 nm之间。这些纳米粒子将通过丝网印刷被固化成具有尺寸的永磁体结构，以弥合永磁体薄膜(几纳米到几微米)和微机械加工的永磁体(大于500微米)之间的间隙。用丝网印刷法制备的各向异性硬磁纳米粉末可以作为尺寸在十微米到几百微米之间的小型永磁体结构，用于各种设备。改进的磁性将在这些应用中产生更好的性能。该奖项是根据2009年美国复苏和再投资法案(公法111-5)资助的。

This Small Business Innovation Research Phase I project proposes to develop anisotropic hard magnetic nanoparticles, based on rare earth transition metal compounds, with particle size in the range of 200 nm down to 100 nm. These nanoparticles will be consolidated by screen-printing into permanent magnet structures with dimensions to bridge the gap between the permanent magnet thin films (few nanometers to a few microns) and micromachined permanent magnets (larger than 500 microns). The anisotropic hard magnetic nanopowders consolidated by screen printing can serve as small permanent magnet structures with dimensions between ten microns to hundreds of microns for various devices. The improved magnetic properties will yield enhanced performance in these applications.This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).