Optimized Manufacturing of Microholes in Ceramic Materials by Dry Electrical Discharge Machining

由于其热工作原理，允许几乎无力加工独立于工作材料的机械性能电火花加工（EDM）是一种成熟的生产技术，用于制造微孔。特别是在加工陶瓷这一注定要在微细技术领域应用的材料时，电火花加工越来越多地发挥作用。然而，具有复杂几何形状和高深宽比的精密微孔的生产通常涉及许多困难。高电极磨损、低材料去除率以及在高深宽比和小间隙宽度下冲洗问题的增加是加工过程中的限制因素。在制造高精度微孔时，不断提高生产率的需求使得钻孔工艺必须不断优化和调整。预期的科学工作的目标是研究和应用特定的技术，在陶瓷材料中高精度制造微孔。因此，本文将研究的重点放在如何应用最小电极损耗和提高材料去除率的方法上，对导电陶瓷的干式电火花加工技术进行了分析，包括加工工艺、技术经济等方面的问题。

Due to its thermal working principle that allows a nearly force free machining independent of the working material´s mechanical properties Electrical Discharge Machining (EDM) is a well established production technique for manufacturing micro holes. Especially when machining ceramics, a materialgroup that is predestined for the application within the field of micro technology, EDM comes more and more into action. However, the production of precise micro holes with complex geometries and high aspect ratios is often related to many difficulties. High electrode wear, small material removal rate andincreasing problems concerning flushing at high aspect ratios and small gap widths are limiting factors during the machining process.The continuous demand for an increasing productivity when manufacturing high-precision micro holes makes a constant optimization and adaptation of the drilling process mandatory. Goal of the intended scientific work is the investigation and application of specific technologies for highprecision manufacturing of micro holes in ceramic materials. At this, the research´s focus will be put on the application of methods to minimize the electrode´s wear and to increase the material removal rate.Therefore a dry EDM drilling technique to machine conductive ceramics is analyzed, including the processing of technical, technological and economical topics.