Cladding-Pumped Silicon Raman Amplifiers Integrated with In(Ga)As Quantum Dot Laser Pumps

目的：本计划的目的是演示在硅衬底上的位错滤波器上生长的InGaAs/GaAs量子点激光器，该激光器将用作集成在同一芯片上的包层泵浦Si拉曼放大器的泵浦源。通过蚀刻衬底的平面化和形成的沟槽内的再生将使激光泵浦直接耦合到硅波导中成为可能。硅波导的上包层将使用氮化硅形成。核心硅波导将通过热氧化来缩小图案波导的横截面尺寸。知识优势：知识优势是高性能混合III-V硅激光器的首次演示及其与硅拉曼放大器的集成。高性能混合硅激光器一直难以捉摸，他们的演示是变革性的。与泵浦源集成的高增益硅光放大器的演示也是变革性的，被认为是集成光子学的一个里程碑。所提出的亚微米波导制造技术避免了电子束光刻制造亚微米波导的困难。更广泛的影响：更广泛的影响是该项目的跨学科性质，它的本科生和代表性不足的少数民族以及K-12的外展。拟议的计划将对科学和社会产生超越技术价值的更广泛影响。它将光电子学与微电子学、物理学和材料科学与工程相结合，从而将光电子学扩展到实际应用中。拟议的计划概述了研究生和本科生的跨学科研究。强调了针对妇女和代表性不足的少数群体的外联项目。该计划建议让初高中学生接触科学和工程学科。

Objective: The objective of this program is to demonstrate InGaAs/GaAs quantum dot laser grown on dislocation filters on silicon substrates that will be used as a pump source for cladding-pumped Si Raman amplifiers integrated on the same chip. Planarization via etching the substrates and regrowth inside the formed trenches will make it possible to couple the laser pump directly into Si waveguides. The upper cladding of Si waveguides will be formed using silicon-oxynitride. The core Si waveguide will be fabricated by shrinking the cross-section dimensions of patterned waveguides via thermal oxidation. Intellectual merit: The intellectual merit is the first demonstration of high-performance hybrid III-V on Si lasers and their integration with Si Raman amplifiers. High-performance hybrid Si lasers have been elusive and their demonstration is transformative. Demonstration of a high-gain silicon optical amplifier integrated with a pump source is also transformative and is considered a milestone in integrated photonics. The proposed waveguide fabrication technique avoids the difficulties of electron-beam lithography for submicron waveguide fabrication.Broader impacts: The broader impacts are the interdisciplinary nature of the program, its undergraduate and underrepresented minorities and K-12 outreach. The proposed program provides a broader impact to science and society beyond technical merits. It combines optoelectronics with microelectronics, physics, and materials science and engineering, thereby extends optoelectronics to real applications. The proposed program outlines interdisciplinary research for graduate and undergraduate students. Outreach projects for women and underrepresented minorities are highlighted. The program proposes to expose middle- and high-school students to scientific and engineering disciplines.