Planning Visit: U.S. - Japan Research on Effective Fast Robust Control of a Precision Planar Motion Stage for Manufacturing and Instruments

纳米技术的一个重要领域是纳米器件、制造和测量，以促进科学、工程和经济的发展。精密工作台系统不仅广泛应用于半导体制造系统和精密机床中，而且还广泛应用于三坐标测量机、曲面测量机等扫描式测量仪器中。这些系统要求具有亚微米到纳米级的定位分辨率，但在不可避免的不确定性和干扰存在的情况下，也要求具有高速和长行程，这是广泛制造和仪器仪表领域中纳米技术设备的一个挑战和众所周知的困难。通过此次研究计划访问，来自北卡罗来纳大学夏洛特分校的王胜国教授将与日本合作伙伴东北大学纳米计量与控制实验室/研究中心主任高伟教授一起研究精密工作台系统，并通过分享互补的专业知识和研究资源，开发一个合作的高级实践研究项目，以应对纳米技术方面的这一挑战。更广泛的影响包括国际合作；通过在两个领先工业国的先进领域提供合作国际工作的早期职业介绍，培训美国研究生；以及促进互利合作关系。

One of the important areas in nanotechnology is nanoscale devices, manufacturing and measurement for advance of science, engineering and economy. Precision stage systems are widely used not only in semiconductor manufacturing systems and precision machine tools, but also in scanning-type measuring instruments such as coordinate measuring machines and surface measuring machines. These systems are required to have submicron to nanometer positioning resolution, but also high speed and long travel range in the presence of unavoidable uncertainties and disturbances, which is a challenge and a well-known difficulty in nanotechnology devices in broad manufacturing and instrumentation areas. Through this research planning visit, Prof. Sheng-Guo Wang from the UNC-Charlotte, together with Japan partner Prof. Wei Gao, Director of Nano-Metrology and Control Laboratory/Research Center at Tohoku University, will investigate precision stage systems, and develop a collaborative advanced practical research project to meet this challenge in nanotechnology by sharing their complementary expertise and research resources. Broader impacts include the international cooperation; training of U.S. graduate students by providing an early career introduction to collaborative international work in advanced areas in two leading industrial countries; and promotion of a mutually beneficial collaborative relationship.