SBIR Phase I: Batch Fabrication of High Aspect Ratio Metallic AFM Probes

这个小企业创新研究第一阶段项目是为了证明批量制造高纵横比原子力显微镜（AFM）探针的可行性。这些探头具有优异的机械和电气性能，可定制广泛的应用和基板。目前，每个探针都是通过在室温下将镀银探针浸入熔化的镓中来单独制造的，从而在探针尖端上形成一个长而直径恒定的金属纳米针。目前的生产能力每小时只有5个探头。由于其独特的形式和功能，对这些探头的需求不断增长，只有并联制造才能满足需求。在第一阶段，将开发一个批量工艺，目标是在1平方厘米的面积上实现中等产量（25%）。该项目的一个创新方面是使用镓涂层基板，该基板具有弹性底层，可以提供一定程度的自对准，确保厚镓膜层与不完全平坦的表面紧密接触。在未来的研究中，将这一概念扩展到弯曲和多层基板上的独立纳米针阵列的图案似乎是合理的。在第一阶段获得足够产量的基础上，第二阶段将重点开发用于晶圆级探针生长的半自动工具。该项目更广泛的影响/商业潜力是一种新型专用AFM探针的商业可行性大大提高。AFM探针的总市场为3.85亿美元，如果这种探针可以大量制造，则可达到1亿美元。自从2008年底推出这项技术以来，客户的反馈一直非常积极。这些探针的当前客户已经明确表示，这种新的探针技术代表了一种有利的工具，将有助于推进和加快研究和发现的步伐，包括纳米操作，生物物理探测，纳米力学，纳米电子学和计量学。长期的经济和社会影响将是一种新的制造产品，这将有助于保持美国在纳米技术方面的领导地位，并为肯塔基州的科学家和工程师创造高薪的技术工作岗位，而肯塔基州的科学家和工程师的机会传统上非常有限。

This Small Business Innovation Research Phase I project is to demonstrate the feasibility of batch fabricating high-aspect ratio atomic force microscopy (AFM) probes. These probes have excellent mechanical and electrical properties and are customizable to a wide range of applications and substrates. Currently each probe is individually fabricated by dipping a silver-coated probe into melted gallium at room temperature, resulting in the self-assembly of a long, constant-diameter metal nanoneedle on the probe tip. Current production throughput is only five probes per hour. Because of their unique form and function there is a growing demand for these probes which can only be met if they are fabricated in parallel. In Phase I, a batch process will be developed, with the goal of moderate yield (25%) over a 1 cm square area. One innovative aspect of the project is the use of a gallium coated substrate that has an elastomeric underlayer to provide a degree of self-alignment that ensures intimate contact of the thick gallium film layer with surfaces that are not perfectly flat. The extension of this concept - in future studies - to the patterning of arrays of freestanding nanoneedles over curved and multilevel substrates appears reasonable. Based on the attainment of adequate yields in Phase I, Phase II will focus on the development of a semi-automated tool for wafer-scale growth of probes. The broader impact/commercial potential of this project is a dramatically increased commercial viability of a new kind of specialized AFM probe. The total market for AFM probes is $385 million, of which up to $100 million is addressable, if such probes can be fabricated in larger quantities. Since the launch of this technology in late 2008, customer feedback has been overwhelmingly positive. Current customers of these probes have made it clear that this new probe technology represents an enabling tool which will help advance and accelerate the pace of research and discovery in areas including nanomanipulation, biophysical probing, nanomechanics, nanoelectronics and metrology. The long range economic and societal impact will be a new manufactured product which will help to maintain U.S. leadership in nanotechnology and create high-paying technical jobs for scientists and engineers in Kentucky, a state where such opportunities have traditionally been extremely limited.