Sensor devices based on integrated, functionalized carbon nanotubes

TP5第二阶段的大纲包含以下四个工作包：AP1“传感器平台和压阻传感器”，AP2“光学传感器”，AP3“合成和碳纳米管功能化概念”和AP4“基于碳纳米管的传感器器件的单片集成”。AP1一直致力于将碳纳米管集成到微机电系统（MEMS）中。特别是碳纳米管和金属电极之间电接触的形成及其在操作过程中的可靠性似乎是具有挑战性的。为了回答相关问题，我们计划与TP3密切合作，使用第一阶段推出的纳米机械臂和电子显微镜进行更全面的研究。现有的测试平台将进一步开发，以光学和/或电子方式表征在机械负载下运行的单个碳纳米管。通过与TP2和TP3的合作，我们计划设计和制造带有热致动器的MEMS结构，用于表征基于碳纳米管的压阻传感器。AP2和AP3的目标是将第一阶段成功展示的集成碳纳米管与金属纳米颗粒的片上功能化应用于通过微工艺处理实现光学传感器。为此，AP 3将评估化学功能化的必要方法，其中最吉祥的方法将与AP 2中的晶圆级技术相结合。就其本身而言，AP 2将开发一个合适的设备几何形状，并推导和执行一个可能的微技术工艺计划。具体的任务是，在控制功能化的选择性、程度和密度方面，将实验室规模的金属纳米颗粒在碳纳米管上并置于微技术环境中。作为一种核心的新方法，我们计划将细长的金和银纳米颗粒与球形纳米颗粒一起使用。对于前者，在第一阶段可能已经有新的合成路线被报道。纳米结构的表征将沿着两条路径进行：首先，确定所涉及的纳米级成分的结构特性，其次，表征整个系统的功能特性（电流-电压特性，吸收，效率，极化）。最后，ap4将与TP7密切合作，开发基于碳纳米管的单片集成传感器系统。首先，它是基于光学碳纳米管传感器所期望的参数。在项目过程中，这项任务的输入将越来越多地来自于AP 3中的实验测量。

The outline for phase 2 of TP5 contains four work packages as follows: AP1 "Sensor platform and piezoresistive sensor", AP2 "Optical sensor", AP3 "Concepts for synthesis and CNT functionalization" und AP4 "Monolithic integration of CNT-based sensor devices".AP1 is continuously dedicated to the integration of CNTs in microelectromechanical systems (MEMS). Especially the formation of an electrical contact between the CNT and metal electrodes and its reliabililty during operation appeared to be challenging. In order to answer related questions, we plan more comprehensive investigations using the nanomanipulator launched in phase 1 and electron microscopy, in close co-operation with TP3. The existing test platform will be further developed to optically and/or electronically characterize single CNTs in operation under mechanical load. In co-operation with TP2 and TP3, we plan the design and manufacturing of MEMS structures with thermal actuators for the characterization of CNT-based, piezoresistive sensors.AP2 and AP3 have the aim to apply the on-chip functionalization of integrated CNTs with metal nanoparticles succesfully shown in phase 1 to achieve optical sensors via microtechnological processing. For this aim, AP 3 will evaluate the necessary approaches for a chemical functionalization, with the most auspicious ones to be conjoined with the wafer-level technology in AP 2. On its part, AP 2 will develop a suitable device geometry and derive and execute a possible microtechnological process plan. The particular task is in that, to improve the transformation of the successful lab-scale juxtaposition of metal nanoparticles on CNTs to the microtechnological environment with respect to controlling the selectivity, degree and density of functionalization. As a central, new approach we plan to employ elongated gold and silver nanoparticles alongside with spherical ones. For the former, a novel synthesis route could be reported already during the first phase. The characterization of the nanostructures will be carried out along two pathes: first, the determination of the structural properties of the involved nanoscale constitutents, second, the characterization of the functional properties of the entire system (current-voltage characteristics, absorption, efficiency, polarization).Finally, AP 4 will develop a strategy for a monolithically integrated CNT-based sensor system in close co-operation with TP7. In the beginning, it is based on the parameters expected for the optical CNT-based sensors. In the course of the project, the input for this task shall increasingly be derived from the experimental measurements in AP 3.