An Innovative Microfabricated Ionic Wind Pump Array for Thermal Management Applications

PIS：Norman C.Tien，Alexis R.Abramson Proposal#：1067159随着微电子元器件继续小型化，功率密度大幅增加，对新型热管理解决方案的考虑变得至关重要。新技术，如拟议的微型制造离子风泵，必须提供一种卓越的解决方案，满足行业对散热效率的要求，并且静音，不包含移动部件，并具有低重量和低体积。针对这一需求，本研究的目标是对一种创新的微型制造离子风泵进行建模、设计、制造和测试，最终使其性能超过传统的CPU松饼风扇。离子风泵装置的工作原理是在发射电极和收集电极之间施加足够高的电压，由于高压电场的存在，导致附近的空气分子从发射极向收集极推进，从而导致对流冷却。本工作所采用的方法和手段包括：用于器件设计优化的计算多物理建模、用于流动显示的粒子图像测速、器件微制造(包括作为发射极尖端的碳纳米管的生长)和器件测试。这项工作的预期结果将是开发出一种创新的离子风泵设备，与传统技术相比，该设备无论是单独还是与热传播器一起使用，都具有更强的散热能力。这种“主动散热”装置将满足不同的行业需求，并有可能取代笔记本电脑和其他便携式设备中使用的现有冷却风扇技术，使其更可靠，外形更小，更安静。这一提议的智力优势包括对离子风泵装置进行系统的建模、设计、制造和测试，这将促进在电流体力学、热传输、流体力学和微制造领域的知识和理解。为这项工作收集了一些初步数据，包括初步的计算建模、第一代测试结构的微制造、流动可视化和冷却现象的实验验证。这项研究具有变革性，因为我们是在电流体动力学和热传输的交叉点上进行研究，其中蕴含着一种独特的、可商业化的热管理解决方案的潜力。这项拟议的计划将利用研究人员各自的优势，利用PI的实验室和CWRU多用户设施中经过验证的技术。这项提议的更广泛影响包括促进创新的微制造热管理设备的发现和开发，以促进高速电子行业的未来进步。所有级别的学生都将参与这项研究项目：至少一名博士生、一名硕士生、四名本科生和各种高中生将被介绍给与这项工作相关的现实世界问题。在艾布拉姆森博士的“纳米技术导论”课程中，将开设为期两周的微细加工/微机械课程。为了促进高中参与，将在当地高中测试并公开传播一个关于热管理主题的令人兴奋的教学模块。研究成果将通过会议报告、期刊论文和网站出版物进一步传播，以增进对科学和技术的了解。

PIs: Norman C. Tien, Alexis R. Abramson Proposal #: 1067159As microelectronics components continue to be miniaturized, power density is increasing substantially, and considerations for novel thermal management solutions are becoming critical. New technologies such as the proposed microfabricated ionic wind pump must offer a superior solution that meets industry requirements for heat removal effectiveness and is silent, contains no moving parts, and boasts a low weight and volume. In response to this need, the objective of this research is to model, design, fabricate and test an innovative, microfabricated ionic wind pump that ultimately outperforms a conventional CPU muffin fan. The ionic wind pump device works by applying a sufficiently high voltage between emitting and collecting electrodes, which causes nearby air molecules to be propelled from emitter to collector due to the presence of a high electric field, resulting in convective cooling. Methods and approaches employed for this work include: computational multiphysics modeling for device design optimization, particle image velocimetry for flow visualization, device microfabrication (including growth of carbon nanotubes as emitter tips) and device testing. The expected outcome of this work will be the development of an innovative ionic wind pump device that either alone or in conjunction with a thermal spreader, demonstrates enhanced heat removal capabilities as compared with conventional technologies. This "active heat sink" device will meet various industry requirements and will have the potential to replace existing cooling fan technologies used in laptops and other portable devices, making them more reliable, of smaller form factors and quieter.The intellectual merit of this proposal includes the systematic modeling, design, fabrication and testing of an ionic wind pump device, which will lead to the advancement of knowledge and understanding in the fields of electrohydrodynamics, thermal transport, fluid mechanics and microfabrication. Some preliminary data for this work has been collected including initial computational modeling, microfabrication of first generation test structures, flow visualization and experimental validation of the cooling phenomenon. This investigation is transformative because we are investigating at the intersection of electrohydrodynamics and thermal transport, wherein lies the potential for a unique and commercializable thermal management solution. The proposed program will leverage the respective strengths of the investigators, utilizing proven techniques available in the PI's laboratories and at multi-user facilities at CWRU.The broader impact of this proposal includes advancing the discovery and development of an innovative, microfabricated thermal management device to enable future progress in the high-speed electronics industry. All levels of students will be involved in this research project: at least one Ph.D. student, one Masters student, four undergraduate students and various high school students will be introduced to real-world problems associated with this work. A two week lesson on microfabrication/MEMS in Dr. Abramson's "Introduction to Nanotechnology" course will be developed. To promote high school participation, an exciting teaching module on the topic of thermal management will be tested at local high schools and publicly disseminated. Results from research will be further disseminated via conference presentations, journal papers and web site publication to enhance scientific and technological understanding.