GOALI: Developing Uncooled Microbolometer Arrays Based on Thin Films of Hole Doped Rare Earth Perovskite Manganite Materials

拟议的工作是陶森大学和工业合作伙伴Triton Services Inc.之间的合作，旨在开发基于空穴掺杂稀土钙钛矿锰矿材料薄膜的非冷却微辐射热计阵列。采用晶格工程方案，在硅上开发外延锰矿薄膜，并优化这些薄膜的性能，使其能够在室温或接近室温的条件下工作。将制作单个测试辐射热计和微辐射热计阵列，并评估器件性能。知识优势：与目前用于非冷却红外成像的其他热辐射计材料相比，锰酸盐材料在灵敏度、稳定性和坚固性方面具有优越的性能。锰矿微辐射热计阵列的成功演示和评估将导致该技术被红外成像行业同化。所提议的努力将产生一个与材料操作、硅集成和设备制造有关的知识库，这将对锰的其他技术应用有用。异质外延晶格工程中涉及的材料物理学将有助于对氧化物异质结构和界面的理解。更广泛的影响：建议的努力将通过产学研的互动来提高陶森大学学生的教育体验。最近开始的专业科学硕士课程的研究生将参与拟议的工作。产学合作和学生参与应用研究将成为其他专业科学硕士课程的典范。与拟议项目相关的内容也将纳入陶森大学K-12 STEM外展活动。

The proposed work is a collaborative effort between Towson University and the industrial partner Triton Services Inc. towards developing uncooled microbolometer arrays based on thin films of hole-doped rare earth perovskite manganite materials. Epitaxial manganite thin films will be developed on Silicon, employing lattice engineering schemes, and the properties of these films will be optimized for bolometer operation at or close to room temperature. Single test bolometers and microbolometer arrays will be fabricated and device performance will be evaluated. Intellectual merit: Manganite materials hold potential for superior performance in terms of sensitivity, stability and robustness compared to other bolometer materials currently employed for uncooled IR imaging. Successful demonstration and evaluation of manganite microbolometer arrays will lead to the assimilation of this technology by the IR imaging industry. The proposed effort will generate a knowledge base related to materials manipulation, silicon-integration and device fabrication, which will be useful for other technological applications of the manganites. The materials physics involved in the hetero-epitaxial lattice engineering will contribute to the understanding of oxide hetero-structures and interfaces.Broader Impacts: the proposed effort will enhance the educational experience of the students at Towson University through the industry-university interaction. Graduate students of the recently started professional science masters program will be involved in the proposed work. The industry-university collaboration and student involvement in applied research will serve as a model for other professional science masters programs. Content related to the proposed project will also be incorporated in K-12 STEM outreach activities at Towson University.