GOALI: ADVANCING THE UNDERLYING SCIENCE OF IN-LINE RF METROLOGY AND PULSED RF POWER DELIVERY FOR LOW TEMPERATURE PLASMA HEATING

该项目将通过独特的学术/行业伙伴关系推进一类对美国高科技经济至关重要的制造工艺，该伙伴关系将通过基于科学的理解和学习应用于多个国内行业（包括电子，能源和环境）中使用的系统来推进制造。 这些制造工艺利用由射频电源驱动的反应等离子体系统。具体而言，该计划将推进脉冲射频加热的知识，以提高未来技术制造节点的等离子体辅助制造能力。 这些等离子体的脉冲射频（PRF）加热在其改变等离子体化学和等离子体/表面相互作用的能力方面展示了前所未有的动态范围。 采用PRF的稳定的、有制造价值的系统的进步将使新工艺能够用于具有广泛国家利益的应用，包括集成电路制造、能源生产和医疗应用。 该项目将通过一套时间分辨诊断将测量的等离子体条件与波形分辨电压，电流和相位测量相关联，从而促进对瞬态RF系统的等离子体响应的理解，该测量系统能够将电气系统的瞬态响应解析到科学界以前无法获得的准确度水平。 该项目将利用这种独特的学术/行业合作伙伴关系来开发教育模块，这些模块不仅将纳入等离子体科学的既定STEM计划，而且还将纳入考虑在其专业中专注于低温等离子体应用的中期职业技术人员的免费继续教育模块。 最后，这个项目将开发教学，视觉刺激的媒体，旨在教育高中水平的科学教师对等离子体科学的应用在一系列的行业，是有形的典型高中生，如微电子，显示技术，和光伏制造。

This project will advance a class of manufacturing processes that are critical to the high technology economy of the United States through a unique academic / industry partnership that will advance manufacturing through science-based understanding and application of learning to systems used in a plurality of domestic industries spanning electronics, energy, and the environment. These manufacturing processes utilize reactive plasma systems that are driven by radio frequency power sources. Specifically, this program will advance the knowledge of pulsed radio frequency heating to advance plasma assisted manufacturing capability for future technology manufacturing nodes. Pulsed Radio Frequency (PRF) heating of these plasmas demonstrates unprecedented dynamic range in its ability to modify plasma chemistry and plasma/surface interactions. The advancement of stable, manufacturing worthy systems that employ PRF will enable new processes for applications of broad national interest including integrated circuit fabrication, energy production, and medical applications. This project will advance the understanding of plasma response to transient RF systems by correlating measured plasma conditions via a suite of time resolved diagnostics to waveform-resolved voltage, current, and phase measurements made with an in-line RF measurement system capable of resolving the transient response of the electrical system to levels of accuracy previously not available to the scientific community. This project will leverage this unique academic/industry partnership to develop educational modules that will be incorporated into not only an established STEM program in plasma science, but also into freely accessible continuing education modules for mid-career technologists considering a focus in low temperature plasma applications in their profession. Finally, this project will develop instructional, visually stimulating media designed to educate high-school level science teachers on the application of plasma science in an array of industries that are tangible to the typical high school student, such as microelectronics, display technology, and photovoltaic fabrication.