Ultrasonic Vibration Assisted NanoMachining for High-rate Tunable 2D and 3D Nanofabrication

本研究的目的是探索一种低成本，高速，可调的纳米加工方法，利用尖锐的悬臂尖端与超声振动的帮助。尖端和样品之间的可控超声振动使得在一个通道内以高效率可调地制造宽尺寸范围的特征。本研究将工艺创新和工艺建模（用于分析纳米加工过程的材料、几何和工艺参数的经验模型）结合起来，为高速率纳米加工创造了一种新的制造工艺。我们将探索一种高速、高精度的纳米定位平台，以充分利用超声振动辅助纳米加工工艺的高速率能力，创建一种新型制造系统，能够高通量制造2D和3D纳米尺度特征。如果成功，这项研究的结果将通过提供一种低成本、高通量的方法来制造2D和3D纳米结构，从而推动新兴的纳米制造业。考虑到其他纳米制造方法（如电子束光刻，euv光刻）的成本和高投资，本研究的结果将为纳米级特征和器件的制造提供一个变革和有效的框架，并有可能为许多进化产品做出贡献，如纳米电子学，太阳能电池，光子学和生物医学设备。此外，这项研究将把纳米技术、纳米制造、力学、过程建模和仪器仪表方面的广泛发现整合到一个高速率、低成本的纳米制造系统中。同时，计划中的多学科研究型教育项目将把研究成果与学生联系起来。为满足当代工业对纳米技术、纳米制造和仪器的需求而开展的活动。研究结果将通过技术出版物、讲习班、定期和短期课程以及K-12外展方案广泛传播。

The objective of this research is to investigate a low cost, high speed, tunable NanoMachining approach using sharp cantilever tips with the help of ultrasonic vibration. The controllable ultrasonic vibration between the tip and the sample enables tunable fabrication of features across a wide dimensional range in one pass with high efficiency. This research incorporates process innovation and process modeling (empirical models for analysis of the nanomachining process with respect to material, geometric and process parameters) to create a novel manufacturing process for high rate nanofabrication. A high speed, high precision nanopositioning stage will be explored to fully utilize the high rate capabilities of the ultrasonic vibration assisted nanomachining process to create a novel manufacturing system, capable of high-throughput fabrication of 2D and 3D nanoscale features.If successful, the results of this research will advance the emerging nanomanufacturing industry by providing a low-cost, high-throughput method for the fabrication of 2D and 3D nanostructures. Considering the cost and high investment of other nanofabrication approaches (e.g. e-beam lithography, EUV-lithography), the results from this research will provide a transformative and efficient framework for the fabrication of nanoscale features and devices with the potential to contribute to many evolutionary products, such as nano-electronics, solar cells, photonics, and biomedical devices. Moreover, this research will integrate broad discoveries in nanotechnologies, nanofabrication, mechanics, process modeling, and instrumentation into a high rate, cost effective nanomanufacturing system. Meanwhile, the planned multidisciplinary research-based education program will link the research outcomes and students? activities to the needs of contemporary industry for nanotechnology, nanofabrication, and instrumentation. The research results will be broadly disseminated through technical publications, workshops, regular and short courses, and K-12 outreach program.