Pre-Production for Silicon Run Nanoelectronics Video

该项目由美国国家科学基金会（NSF）高级技术教育（ATE）和改善本科STEM教育（IUSE:EHR）项目支持，将举办一个研讨会，开始开发教育视频材料，记录现代硅基微电子集成电路的生产过程。该项目将由加州山景城的Silicon Run Productions公司牵头。这项工作的最终目标是教育工作者可以使用的视频材料，使各级学生受益，特别强调本科科学、技术、工程、数学和计算机科学学生以及普通公众的教育。硅基技术对几乎所有的消费产品以及支持半导体基础设施的许多行业都至关重要。硅基集成电路（IC）微加工也是新兴技术产品的核心，如集成IC工艺或利用混合格式的微机电系统（MEMS）。由于洁净室和竞争问题，获得最先进的工业微加工场地是有问题的。该项目已经能够获得硅基纳米技术集成电路设施的合作，用于开发和拍摄纪录片材料。由于很少有机会接触到这样的设施，这段教育视频将为学生提供一个真实世界的视角，让他们了解现代电子产品（如手机）所依赖的工业集成电路制造。纳米电子学视频将介绍用于制造当今平面和三维半导体器件的最先进的制造工艺。该项目将开始活动的前期制作阶段，并与教育工作者和工业界一起举办讲习班。研讨会的重点将是审查现有材料，探索视频的可能作用和内容，使其能够最好地为学生和参与的公众服务。根据讲习班的意见，将编写一份暂定脚本，作为微加工设施初步工作的基础。该项目有一个独特的机会来记录一个现代化的300毫米晶圆生产线，专门从事纳米电子和亚22纳米工艺技术。纳米电子学视频项目的这一阶段将为现代技术中一个重要领域的高质量文献处理提供第一步，从而对当前的半导体加工视频进行长期需要的更新。预期这项工作将对技术人员、工程师、科学家的教育和培训以及一般公众的教育产生广泛的影响。

This project supported by the National Science Foundation (NSF) Advanced Technological Education (ATE) and Improving Undergraduate STEM Education (IUSE:EHR) programs will conduct a workshop to begin development of educational video materials documenting how modern silicon-based microelectronic integrated circuits are produced. The project will be led by Silicon Run Productions of Mountain View, California. The eventual goal of the effort is video material that can be used by educators for the benefit of students at all levels with particular emphasis on undergraduate science, technology, engineering, mathematics, and computer science students and the education of the general public. Silicon-based technology is vital to nearly all consumer products as well as the many industries that support the semiconductor infrastructure. Silicon-based integrated circuit (IC) microfabrication is also central to emerging technological products such as micro-electromechanical systems (MEMS) that incorporate IC processes or utilize hybrid formats. Gaining access to state-of-the-art industrial microfabrication sites is problematic due to cleanroom and competitive issues. The project has been able to enlist cooperation of a silicon-based nanotechnology integrated circuit facility for the purposes of developing and filming documentary material. With otherwise little access to such facilities, the intended educational video will provide students with a real-world look at industrial integrated circuit manufacturing upon which modern electronics such as mobile phones rely.The Nanoelectronics video will feature the most advanced manufacturing processes used to make todays planar and three-dimensional semiconductor devices. This project will begin the pre-production phases of the activity and conduct a workshop with educators and industry. The workshop focus will be to review the existing material and explore the possible role and content of the video so it can best serve students and an engaged general public. With input from the workshop, a tentative script will be written to serve as a basis for preliminary work in the microfabrication facility. The project has a unique opportunity to document a modern 300 mm wafer manufacturing line that specializes in nanoelectronics and sub-22 nm process technology. This phase of the Nanoelectronics video project will provide the first steps toward a high-quality documentary treatment of a vital area in modern technology resulting in a long-needed update to current semiconductor processing videos. The work is expected to have a broad impact on the education and training of technicians, engineers, scientists and the education of the general public.