Principal effects of ternary oxide dielectric layers on SPR sensors for gas sensing with ellipsometric readout

BAM、柏林联邦材料研究与测试研究所、UJEP、Jan Evangelista Purkyne大学（Usti and Labem）的联合项目旨在研究新型基于spr的气体传感器，该传感器含有金层和薄介电覆盖层。作为SPR器件的金层将被涂上几种不同的附加氧化物层，如SnO2， ZnO, TiO2，掺杂不同的其他金属离子。研究的主要基质体系是SnO2和ZnO。下面的金SPR传感器层将在BAM的涂层实验室生产，然后在UJEP的涂层实验室用溅射氧化层进行修饰。这些层系将用不同的椭偏光谱来分析，以评估它们的介电函数随掺杂材料及其浓度的变化。随后，将对这些系统进行气敏研究，评估不同气体和气体混合物在灵敏度和长期稳定性方面的变化。在这种情况下，一氧化碳气体是特别感兴趣的。这些研究的目的是发现这些层的掺杂类型和浓度与它们作为气敏器件的性能之间的相关性。该项目部分位于BAM，并在此提出资助，将包括对制造的多层系统进行椭偏分析，以及使用激光椭偏仪作为探测器的SPR气敏测量。在此基础上，建立红外反射/椭偏实验，研究Fe:SnO2 / CO传感系统中的吸附气层和化学吸附过程。

The joint project between BAM, Federal Institute for Materials Research and Testing in Berlin and UJEP, the Jan Evangelista Purkyne University in Usti nad Labem aims to investigate new SPR-based gas sensors containing gold layers with thin dielectric overcoatings. Gold layers as SPR devices will be coated with several different additional oxide layers, such as SnO2, ZnO, TiO2, doped with different other metal ions. The main matrix systems investigated will be SnO2 and ZnO. The underlying gold SPR sensor layers will be produced in the coatings lab at BAM and then modified with sputtered oxide layers in the coatings lab at UJEP. These layer systems will be analysed by means of different spectroscopic ellipsometry to evaluate their dielectric function depending on the doping material and its concentration. Subsequently, gas sensing studies will be carried out with these systems evaluating the changes in sensitivity and long-term stability regarding different gasses and gas mixtures. In this case, the gas carbon monoxide is of special interest. The aim of these studies is to find a correlation between the dopant type and concentration of these layers and their properties as gas-sensing devices. The project part located at BAM and proposed for funding hereby will comprise ellipsometric analysis on the manufactured multilayer systems as well as SPR gas sensing measurements using laser ellipsometry as the detector. Further, an Infrared reflectometry / ellipsometry experiment will be built and used to study the adsorbed gas layer and the chemisorption process in the Fe:SnO2 / CO sensing system.