Simulation-assisted Design and Characterization of Abrasive Magnetic Suspensions for High Precision Finishing

微系统工程中的一个常见问题是制造具有光学质量表面的零件。在许多微系统应用中，纳米级的表面粗糙度对器件的性能至关重要。新的制造技术，例如快速成型，可以产生各种复杂的几何形状，但是，表面质量非常差。为了能够制造具有高精度表面的复杂几何形状，开发了一种包括定制设计的悬架的新型精加工技术。高质量的抛光将通过定制的纳米磨料磁流变液来实现，可通过外部感应磁场的力来控制。悬浮液的设计参数将根据所需的纳米抛光质量通过组合的数值和实验方法导出。该项目将提供一个良好的基础，未来的ICME方法采用定制的悬浮液在微系统应用。

A common problem in microsystems engineering is the manufacturing of parts with surfaces of optical quality. In many microsystem applications, a nanometric surface roughness is crucial for the performance of the device. Novel manufacturing techniques as e.g. rapid prototyping, can produce a variety of complex geometries, however, with very poor surface quality. To enable the manufacturing of complex geometries with high precision surfaces, a novel finishing technique including custom-designed suspensions is developed. The high quality finishing will be achieved by tailored nano-abrasive magnetorheological fluids, controllable by forces of externally induced magnetic fields. The parameters for the design of the suspensions will be derived by a combined numerical and experimental approach in accordance with the desired nano-finishing quality. The project will provide a sound basis for future ICME approaches employing tailor-made suspensions in microsystem applications.