Two-dimensional Array of Planar Microlens and Its Applications for Optical Commponents

我们提出了一种分布折射率平面微透镜，它可以通过平面技术制造，即我们选择性地扩散折射率变化的掺杂剂。本研究的主要目的是降低微透镜的像差，提高微透镜的数值孔径，并对叠层平面光学进行演示.阐明了平面微透镜中折射率分布的形成过程。指出了离子在玻璃基片中的扩散常数与离子浓度密切相关，它对形成大数值孔径、小波像差的微透镜有很大影响;给出了离子交换法制备微透镜的最佳条件.我们发展了一种横向电迁移的方法，在横向上施加电场，用于可重复制造和大规模生产平面微结构.通过使用衬底来增加交换离子，我们获得了最大数值孔径为0.54的平面微透镜，它是由两个透镜堆叠而成的.为了展示二维堆叠平面光学的可能性，我们展示了光学抽头阵列，光纤耦合器阵列分支组件等。

We have proposed a distributed-index planar microlens which can be fabricated by a planar technology; i.e. we selectively diffuse a dopant which the refractive index change. In this study, we are aiming at the reduction of aberration and the increase of the numerical aperture of microlens, and the demonstration of the stacked planar optics.1. The distributed-index formation process in a planar microlens is made clear. Also, the theoretical basis of the improvement of a planar microlens is established.1) We indicated that the diffusion constant of the ion strongly depends on its density in a glass substrate, and it quite influences the formation of microlens with large numerical aperture and small wave aberration.2) The optimum conditions for the microlens made by the ion-exchange technique are given.2. We have developed a transverse electromigration where the electric field is applied in transverse direction for reproducible fabrication and mass-production of planar microleses.3. We have obtained a planar microlens with the largest numerical aperture of 0.54 with stacked two lenses, by using a substrate to increase the exchanging ions.4. To show the possibility of 2-D stacked planar optics, we demonstrated an optical tap array, fiber coupler array branching component, and so on.