Batchprocessed flexible micro grinding tools for end maching of metallic surfaces

目前的研究现状表明，对高表面质量和功能化表面的铜部件的性能和效率的要求越来越高。作为该项目的一部分，将采用一种新的工艺生产微型磨具。然而，到目前为止，还没有关于薄膜技术用于高质量加工微细磨具的边界条件的知识。在项目开始时，将考虑制造过程以实现所定义的目标。关于对微型磨具的要求，正在对其性能进行评估。同时，为了优化机械精密加工，对零件表面的电化学氧化进行了研究。针对微细磨削而开发和制造的磨具，从以下几个方面对其在使用中的表现进行了检验。下一步是关于氧化和非氧化表面的不同行为的过程建模。此外，还用经验模型描述了去除行为。在制造出合适的微结构的基础上，对所建立的模型进行了验证。此外，还考虑了过程策略。此外，为氧化铜建立的氧化过程被转移到其他金属上。最后，为各种应用场景的转移提供了合适的工具制造。

The current state of the research shows increasing requirements to the performance and efficiency of copper components with high surface quality and functionalized surfaces. As part of this project micro grinding tools will be produced by a novel procedure. However, up until now there is no knowledge of the boundary conditions of the thin film technology for high quality machining of micro grinding tools. At the beginning of the project the manufacturing process will be considered to achieve the defined goal. As regards to the demands made on the micro grinding tools the properties are being evaluated. Simultaneously, to optimize the mechanical precision machining, the electrochemical oxidation of the component surface is investigated. The grinding tools which are developed and manufactured for the use of micro-abrasiv grinding are examined on the following with regard to their behavior in the use. The next step is a process modeling concerning the different behavior of oxidized and non-oxidized surfaces. In addition, the removal behavior is described in terms of an empirical model. Based on the manufacture of suitable microstructures the established models are finally validated. Furthermore, the process strategy is considered. Furthermore, the established oxidation pocess for copper oxide, is transferred to other metals. Finally, a suited tool manufacturing for the transfer of various application scenarios takes place.