Techniques to Estimate Mechanical Properties of Thin Film Using Contact Theory for Muti-laminate

研究了薄膜力学性能的理论和实验方法。主要研究成果如下：(1)应用赫兹接触理论，假设被膜体内部存在应力场，给出了被膜体间弹性接触问题的近似解。利用该解，提出了一种估算薄膜杨氏模量和泊松比的方法，并将其应用于实验模型。(2)提出了一种用弹塑性有限元法估算薄膜屈服点和加工硬化比的方法。(3)提出了多层板在热载荷作用下的弯曲理论。利用这一理论对薄膜的杨氏模量和泊松比进行了估计，并与实验值进行了比较。

Theoretical and experimental techniques to estimate mechanical properties of thin films are studied. The studies are summarized as follows :(1)By appplying the Hertzian contact theory and assuming a stress field in the film-coated body, an approximate solution of elastic contact problem between film-coated bodies is proposed. By using the solution, a technique to estimate Young's modulus and Poisson's ratio of thin films is proposed and applied to an experimental model.(2)A technique to estimate Yielding point and work hardening ratio of thin films is proposed using the elasto-plastic finite element method.(3)The bending theory of a muti-laminate subjected to thermal load is proposed. By using this theory, Young's modulus and Poisson's ratio of thin films are estimated and compared with the corresdponding experimental values.