Ultrahigh-vacuum system for the synthesis and manipulation of 2D materials and sample transfer to the transmission electron microscope

我们计划建立一个超高真空系统，允许透射电子显微镜（TEM）样品的制备和操作，以及在高真空和不暴露于空气中将这些样品转移到TEM。制备能力将包括热退火，暴露于等离子体和离子辐射，并通过热蒸发层的沉积。特别是对于由2D材料制成的样品，计划将层堆叠在彼此之上的可能性。这样，所谓的货车德瓦尔斯异质结构可以在真空系统内以干净的方式构建。结合通过离子或电子辐照对2D材料进行可控和结构化修饰，这为合成纳米结构的制备开辟了一条全新的途径。

We plan to build an ultra-high vacuum system that allows the preparation and manipulation of samples for transmission electron microscopy (TEM) as well as a transfer of these samples to the TEM in high vacuum and without exposure to air. Preparation capabilities will include thermal annealing, exposure to plasma and ion irradiation, and the deposition of layers via thermal evaporation. Especially for samples made of 2D materials, a possibility to stack layers on top of each other is planned. In this way, so-called van der Waals heterostructures can be built in a clean way inside the vacuum system. In combination with the controlled and structured modification of 2D materials via ion or electron irradiation, this opens an entirely new avenue for the preparation of synthetic nanostructures.