DEVELOPMENT OF HIGH SPEED OPTICAL BEAM SCANNER USING PHASED ARRAY WAVEGUIDES

光束导向装置是光通信和光处理领域中最具吸引力的器件之一，它将成为光学功能器件的基础部件。本研究的目标是利用旋转光学元件实现高速半导体光束扫描器，以取代机械式扫描器。光束转向的原理是光束在多波导中经过相位调整后的干涉。为了实现这一发展，我们需要从以下几个方面进行研究：1)最大化偏转角，2)最大化分辨率点，3)优化波导结构以降低介电容量。为了增加偏转角度，我们必须使波导之间的空间变窄。该器件的间距为4微米，其偏转角为11.2度。接下来，我们使用聚合物平面波导进行多分支，将光束划分为多个波导。因为分辨率点与多波导的数量成正比。本文还研究了MQW波导对光在波导中传播的相位进行有意调整的性能。目前正在进行MQW结构的相位控制试验。

An optical beam steering device is one of attractive ones in optical communication and processing fields, because it will be a fundamental component for optical functional devices.A goal of this study is to realize a high-speed semiconductor beam scanner instead of mechanical ones with a rotating optical element. The principle of steering light beam is the interference of the light beam from intentionally phase-adjusted multi-waveguides. In order to achieve the development, we need to investigate as follows : 1) Maximizing a deflection angle, 2) Maximizing point of resolution and 3) Optimizing the structure of waveguide for decreasing dielectric capacitance.In order to increase the deflection angle, we must make spaces between waveguides narrow. The device with 4 microns spacing has been fabricated to operate at a deflection angle of 11.2 degrees. Next, we performed multi-branch using a polymer planer-waveguide to divide optical beam into multi-waveguides. Because the point of resolution is proportional to the number of multi-waveguides. And we investigate a performance of MQW waveguide to adjust intentionally a phase of light propagated in waveguide. The trial of phase control using MQW structure is being performed.