Electron Probe Microanalyzer

所要求的主要仪器是一台电子探针微分析仪（EPMA），配备一台场发射扫描电子显微镜、一台二次和一台背散射电子探测器、一台能量色散x射线（EDS）光谱仪、4台波长色散光谱仪（WDS）和一台软x射线发射光谱仪。这种电子探针微量分析仪在多特蒙德技术大学开辟了一个新的研究领域，因为它可以定量地确定空间分辨的所有元素（氢除外），检测限约为。0.001%在样品检查和电子显微镜成像。因此，利用多特蒙德工业大学的波长色散光谱仪，首次可以在微米或纳米范围内获得空间分辨率的样品图像，从而检测极低浓度的元素，并鉴定锂、铍和硼元素，以及定量分析轻元素氧、氮和碳。此外，集成的SXES（软x射线发射光谱仪）光谱仪具有识别元素和化学键态的优势，特别是在轻元素区域。在这里，它在50 eV - 210 eV的能量范围内工作，能量分辨率非常高，为0.3 eV（相比之下：WDS: 8 eV， EDS: 130 eV）。这种光谱仪的组合可用于识别和分析空间分辨界面反应，扩散过程，晶界沉淀，相和混合晶体形成，其中元素浓度非常低的元素或轻元素（锂，铍，硼，碳，氮，氧）的操作涉及。对硼化物、碳化物、氮化物和氧化物的空间分辨探测，对金刚石的石墨化效应或化学键态的探测都是可能的。因此，这台电子探针微量分析仪（electronic probe microanalyzer， EPMA）是之前设备的必要补充，它可以澄清定量元素和痕量分析领域的研究问题。在多特蒙德工业大学没有配备这种元素分析设备的电子显微镜。

The requested major instrumentation is an electron probe microanalyzer (EPMA) equipped with a field emission scanning electron microscope, a secondary and a backscattered electron detector, an energy dispersive X-ray (EDS) spectrometer, four wavelength dispersive spectrometers (WDS) and a soft X-ray emission (SXES) spectrometer.This electron probe microanalyzer opens up a new field of research at the Technical University of Dortmund, since it will be possible to quantitatively determine spatially resolved all elements (except hydrogen) with a detection limit of approx. 0.001% during a sample examination and imaging in the electron microscope. The detection of very low element concentrations and the identification of the elements lithium, beryllium and boron and the quantification of the light elements oxygen, nitrogen and carbon will thus be possible for the first time with a spatially resolved sample image in the micro- or nanometer range by the use of wavelength dispersive spectrometers at the TU Dortmund. In addition, the integrated SXES (Soft X-Ray Emission Spectrometer) spectrometer has the advantage of identifying both elements and chemical bonding states, especially in the light element region. Here it worked in the energy range of 50 eV - 210 eV with a very high energy resolution of 0.3 eV (for comparison: WDS: 8 eV, EDS: 130 eV). This combination of spectrometers can be used to identify and analyze spatially resolved interface reactions, diffusion processes, grain boundary precipitations, phase and mixed crystal formations in which elements with very low element concentrations or light elements (lithium, beryllium, boron, carbon, nitrogen, oxygen) on the operations are involved. A spatially resolved detection of borides, carbides, nitrides and oxides, of graphitization effects on diamonds or of chemical bonding states is possible.Therefore, a necessary addition to the previous equipment is the acquisition of this electron probe microanalyzer (EPMA), with which the research questions in the field of quantitative elemental and trace analysis can be clarified. An electron microscope with such an equipment for elemental analysis is not available at the TU Dortmund.