DEVELOPMENT OF XRF AND XRD ANALYZING MICROSCOPE

本研究的目的是开发一种新设计的分析显微镜，用于检测一次x射线照射样品发出的衍射x射线和荧光x射线。该设备将使我们能够在获得样品化学成分信息的同时获得样品的矿物组成和晶体结构信息。该设备在地球科学、材料科学等领域有着广阔的应用前景。在这项研究中，我们首先开发了一种图像分析算法，用于扫描x射线分析显微镜（SXAM）获得的XRF图像。该算法假定XRF强度与矿物组成呈线性关系，将图像转换成矿物分布图。下一步，我们正在开发XRF和XRD显微镜设备。建立了设备的概念方案，构建了原型装置，确定了x射线探测系统的最佳配置。样机的性能测试正在进行中。

The purpose of this study is to develop newly designed analyzing microscope which detects diffracted X-ray as well as fruolescence X-ray emitted from a sample with primary X-ray irradiation. This equipment will enable us to obtain the information of mineral composition and crystal structure of the sample simultaneously with that of chemical composition. There expected to be broad application field of the equipment in earth sciences or material sciences.In this study, we first developed an algorithm of a image analysis for XRF images obtained by the Scanning X-ray Analytical Microscope (SXAM). This algorithm transforms the XRF images into mineral distribution maps assuming linear relationship of XRF intensities with mineral composition. In the next step, we have been developing the equipment of XRF and XRD microscope. We established the conceptual plan of the equipment and constructed prototype device to determine optimal configuration of X-ray detecting system. Performance tests of the prototype is now on going.