Development of High-Efficiently Calibrating Method of the Second Master with 3-Dimensional Curved Surface

以渐开线螺旋面为被测对象，研制了一种用三维曲面测量其形状偏差的样机。该装置的光学系统由激光束构成，取代了传统试验机的触针。用该方法测量的结果精度达到理论曲面的0.2μm以下，与传统的试验机测量结果相比，精度提高了一个数量级以上。作为一种除线性和圆柱面外的测量方法，该测量技术目前被认为能使测量精度高于竞争对手，本研究的主要内容如下：（1）在第一阶段，用平行光束或聚焦光束照射具有不同直径和粗糙度的圆柱面作为初步实验。气缸沿光束方向移动，检查测量移动距离的可能性。从结果来看， ...更多信息 ng方法使每种情况下的光束类型和粗糙度超过#600砂纸完成测量移动距离有足够的精度。(2)通过用电机驱动手动代替手动加工基筒旋转，确认了测量结果的重复性。(3)研究了各种因素对测量结果的影响：（3.1）温度对测量结果影响较大。应考虑测量环境。（3.2）确认了从激光束照射到固定在测量装置上的反射镜的检测系统的电漂移不应被忽略。引入稳定的电源可能是有效的。（3.3）在原子力显微镜上测量齿轮齿面和基圆柱的坐标，在测量范围较宽的情况下，计算出的尺寸与以前的设计值有一定的偏差。分析证实，这一小的偏差的影响，测量的准确性，这种开发的设备。少

By choosing a involute helicoid as a object to be measured, a proto-type apparatus to measure its form deviation with 3-dimensional curved surface is developed. The optical system of the apparatus is constituted with laser beams in stead of contacting stylus of conventional testing machine. Accuracy of the result measured by this method is under 0.2μm to theoretical curved surface and is beyond one-order compared with the one by conventional testing machine. As a measuring method except for object with linear and cylindrical surface, this measuring technique is now considered to bring measuring accuracy above rivalry.In this development, the main term is as follows:(1) In the first stage, parallel beam or a focused beam is irradiated to circumferential surface of cylinder with some kinds of diameters and of roughness as a preliminary experiment. The cylinder being shifted in the direction of the beam, possibility to measure the shifting distance is checked. From the result, the measuri … More ng method makes every case of beam type and roughness finished by grinding paper over #600 measure the shifting distance with sufficient accuracy.(2) By replacing manual processing rotation of base cylinder by motor drive manual, repeatability of the measuring result is confirmed.(3) Effect of some kinds of factors on the measuring result is investigated:(3.1)Temperature influences considerably on the experimental result. Measuring environment should be considered.(3.2)It is confirmed that electric drift of detecting system from irradiation of laser beam to mirror fixed on the measuring apparatus should not be ignored. Introduction of stable electric source may be effective.(3.3)Dimension calculated from the measured coordinates of gear tooth flank and base cylinder put on atomic force microscope with wide measuring range has some deviation compared with the previous designed values. It is analytically confirmed that this little deviation effects on the accuracy measured by this developed apparatus. Less