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Computer Holographic Measurement of Machine Parts by Laser Interferometry

激光干涉技术对机器零件的计算机全息测量

基本信息

批准号：
06555045
负责人：
KUBO Aizoh
金额：
$ 5.12万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555045/
关键词：
Interferometry Laser Computer Holographic Measurement Phase Data Processing Digital Data CCD Image Sensor Tooth Flank Form 位相差位相シフト法形状偏差精度測定干渉計形状誤差

项目摘要

(1) To measure a deviation of objective surface of machine parts, a new interferometer by using the CCD image sensor instead of hologram in the previous proto-type interferometer was developed. The Introduction of the CCD image sensor gives stable measurement.(2) The brightness data of each interference fringe pattern to reference and objective surfaces is converted to discontinuous phase difference. Also a proposal in this report, that is, the computer holographic technique, was applied to the data processing. The technique enable phase to concatenate efficiently.(3) The interference fringe pattern on the CCD image sensor involves a thick density of fringes, and it also contains a considerable amount of noise. The problem to be solved such as pattern connected between neighboring fringes is remained, even if it is relieved by the technique mentioned above. For this problem, some methods by reducing the fringes by inserting concave lens in the path of the reference beam, by applying target surface form and by the heterodyne method using two beam sources with different wave lengths were introduced in the experiment. These methods were successful for data processing from the brightness data to the form deviation.(4) It is not distinct how many interference fringe patterns should be taken by phase shifting method to calculate phase difference from brightness data of interference fringe pattern. From a series of experiment using some plane test pieces, it is cleared that 6-8 sheets of the pattern are sufficient. This result increases considerably efficiency of data processing.

(1)为了测量机器零件的目标表面的偏差，开发了一种使用CCD图像传感器代替先前原型干涉仪中的全息图的新型干涉仪。 CCD图像传感器的引入提供了稳定的测量。(2)将每个干涉条纹图案相对于参考面和物镜面的亮度数据转换为不连续的相位差。报告中还提出了一个建议，即计算机全息技术被应用到数据处理中。该技术使得相位能够有效地级联。(3)CCD图像传感器上的干涉条纹图案具有较厚的条纹密度，并且还含有大量的噪声。即使通过上述技术缓解了诸如相邻边缘之间的图案连接之类的待解决问题，但仍然存在该问题。针对这一问题，实验中介绍了在参考光束路径中插入凹透镜、应用目标表面形状以及使用两个不同波长的光束源的外差法来减少条纹的方法。这些方法成功地完成了从亮度数据到形状偏差的数据处理。(4)相移法需要取多少个干涉条纹图案来从干涉条纹图案的亮度数据计算相位差并不清楚。从使用一些平面测试件的一系列实验可以看出，6-8张图案就足够了。这一结果大大提高了数据处理的效率。